Vacuum arc coatings for tools potential and application

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1、,,IIRMgE.COATINGS[[6HNOLDIELSEVIERSurfaceandCoatingsTechnology76-77(1995)719-724Vacuumarccoatingsfortools:potentialandapplicationJ.VetterMETAPLASOberfl?ichenveredelungstechnilcGmbH,AmBOttcherberg30-38,D-51427BergischGladbach,GermanyAbstractCathodicvacuumarcevapora

2、tioniswidelyusedtodeposithardwear-resistantcoatingsontotoolsandmachineparts.Thispaperreviewsthepotentialfordepositionofdifferenthardcoatings,e.g.MeN,(Me1,M%)N,Me(N,C)inmonolayerandmultilayerformsaswellasintheformofcombinationcoatings.Specificpropertiesofselectedco

3、atingsarediscussedinviewoftheirapplicationsfortools.Keywords:Cathodicvacuumarc;Coatingarchitecture;Graindiameter;Coatingselection;Combinationcoatings1.Introduction2.1.EvaporatorsandcathodematerialsThedevelopmentofcathodicvacuumarcevaporationThetypesofevaporatorsca

4、nbeclassifiedaccording(CVAE)beganinthe1960sandcontinuedinthe1970stotheirgeometriccharacteristicsandthenatureofthewithworkonthedepositionofhardcoatings[1-4].movementcontrolofthearcfeedpoints.ThegeometricalThedevelopmentofCVAEsystemsintensifiedinthearrangementsofthe

5、cathodescanincludecircular(diam-1980sand1990s[5-7].Theexperienceofthelast10eters60-100mm),rectangular(dimensions400-700mmyearsshowsthatalmostalltypesoftoolscanbeinlengthand100-200mminwidth)orcylindricalsuccessfullycoatedbyCVAE.Thispaperreviewsthe(diameters20-180mm

6、andlength300-600mm)activepossibilitiesofCVAEforthedepositionofhardcoatings.surfaces[9,10].Theuseofcathodesfittedwithelectro-Selectedresultswhichdemonstratethepotentialforthemagneticplasmaguidesallowstheplasmatobesepa-depositionofcoatingsarepresented.ratedfromthema

7、cro-particlestreamsothatonlyplasmaparticlesimpingeonthesubstrates[11].~Thearcmovementcanbeclassifiedasfollows:random2.Coatingunitdesignarc(withoutexternalmagneticfields);weaklysteeredarc(weakexternalfieldusedtokeeptheboundariesofFig.1showsthearrangementofcomponent

8、smountedthemovement);steeredarc(withstrongexternalmag-inahighvacuumvessel.Themaincomponentsaretheneticfieldusedtoincreaseremarkablytheintegralarcevapora