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1、B5FUNDAMENTALSOFVACUUMTECHNOLOGYFundamentalsofVacuumTechnologyFundamentalsofVacuumTechnologyrevisedandcompiledbyDr.WalterUmrathwithcontributionsfromDr.HermannAdam,AlfredBolz,HermannBoy,HeinzDohmen,KarlGogol,Dr.WolfgangJorisch,WalterMšnning,Dr.Hans-JŸrgenMundinger,Hans-DieterOtten,WilliScheer
2、,HelmutSeiger,Dr.WolfgangSchwarz,KlausStepputat,DieterUrban,Heinz-JosefWirtzfeld,Heinz-JoachimZenker1FundamentalsofVacuumTechnology2PrefacePrefaceAgreatdealhastranspiredsincethefinalreprintofthepreviouseditionofFundamentalsofVacuumTechnologyappearedin1987.LEYBOLDhasinthemeantimeintroducedanu
3、mberofnewdevelopmentsinthefield.Theseincludethedry-runningALL×exchemicalspump,theCOOLVAC-FIRSTcryopumpsystemswithquickregenerationfeature,turbomolecularpumpswithmagneticbearings,theA-Seriesvacuumgauges,theTRANSPECTORandXPRmassspectrometertransmitters,leakdetectorsintheULseries,andtheECOTEC50
4、0leakdetectorforrefrigerantsandmanyothergases.Moreover,thepresenteditionoftheÒFundamentalsÓgoesintomuchgreaterdetailonsometopics.Amongtheseareresidualgasanalysesatlowpressures,measurementoflowpressures,pressuremonitoring,open-andclosed-looppressurecontrol,andleaksandtheirdetection.Includedfo
5、rthefirsttimearethesectionscoveringthedevicesusedtomeasureandcontroltheapplicationofcoatingsandusesforvacuumtechnologyinthecoatingprocess.NaturallyLEYBOLDÕsÒVacuumTechnologyTrainingCenterÓatColognewasdependentontheinvaluablesupportofnumerousassociatesincollatingtheliteratureonhandandpreparin
6、gnewsections;Iwouldliketoexpresslythankallthoseindividualsatthisjuncture.AspecialwordofappreciationisduetheCommunicationsDepartmentforitsprofessionalcontributioninpreparingthisdocumentforpublishing.RegrettablyDr.HermannAdam,whoatonetimecompiledtheveryfirstversionoftheÒFundamentalsÓ,didnotliv
7、etoseethepublicationofthisedition.Thoughhehadbeeninretirementformanyyears,henonethelesslaboredoverthecorrectionsandeditingofthiscurrenteditionuntilshortlybeforehisdeath.Ihopethatthisvolumewillenjoyaresponseasfavorableasthepreviousversion.Dr.WalterU
