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1、FundamentalsofVacuumTechnology00.200.02Kat.-Nr.19990PrefaceOerlikonLeyboldVacuum,amemberofthegloballyactiveindustrialOerlikonGroupofcompanieshasdevelopedintotheworldmarketleaderintheareaofvacuumtechnology.Inthisleadingposition,werecognizethatourcustomersaroundtheworldcountonOerlikonLeyboldVacu
2、umtodelivertechnicalsuperiorityandmaximumvalueforallourproductsandservices.Today,OerlikonLeyboldVacuumisstrengtheningthatwell-deservedreputationbyofferingawidearrayofvacuumpumpsandaftermarketservicestomeetyourneeds.Thisbrochureismeanttoprovideaneasytoreadoverviewcoveringtheentirerangeofvacuumt
3、echnologyandisinde-pendentofthecurrentOerlikonLeyboldVacuumproductportfolio.Thepresentedproductdiagramsanddataarepro-videdtohelppromoteamorecomprehensiveunderstandingofvacuumtechnologyandarenotofferedasanimpliedwar-ranty.Contenthasbeenenhancedthroughtheadditionofnewtopicareaswithanemphasisonph
4、ysicalprinciplesaffectingvacuumtechnology.Tous,partnership-likecustomerrelationshipsareafunda-mentalcomponentofourcorporatecultureaswellasthecontinuedinvestmentswearemakinginresearchanddevelopmentforournextgenerationofinnovativevacuumtechnologyproducts.Inthecourseofourover150year-longcorporate
5、history,OerlikonLeyboldVacuumdevelopedacomprehensiveunderstandingofprocessandapplicationknow-howinthefieldofvacuumtechnology.Jointlywithourpartnercustomers,weplantocontinueoureffortstoopenupfurthermarkets,implementnewideasanddeveloppioneer-ingproducts.Cologne,June20071FundamentalsofVacuumTechn
6、ology2PrefaceFundamentalsofVacuumTechnologyrevisedandcompiledbyDr.WalterUmrathwithcontributionsfromDr.HermannAdam†,AlfredBolz,HermannBoy,HeinzDohmen,KarlGogol,Dr.WolfgangJorisch,WalterMönning,Dr.Hans-JürgenMundinger,Hans-DieterOtten,WilliScheer,HelmutSeiger,Dr.WolfgangSchwarz,KlausStepputat,Di
7、eterUrban,Heinz-JosefWirtzfeld,Heinz-JoachimZenker34TableofContents1.VacuumphysicsQuantities,theirsymbols,2.2Choiceofpumpingprocess............................60unitsofmeasureanddefinitions.......................92.2.1Surveyofthemostusu
