基于dmd动态掩膜微立体光刻系统的开发与的研究

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1、英文摘要基于DMD动态掩膜微立体光刻系统的开发±j研究DevelopmentandanalysisofDMD·-basedmicrostereolithographysystemAbstractMicroscale3DcomplexstructuresarecriticalforperformanceofMicroElectro—mechanicalSystems(MEMS)，butitstillremainsachallengefortraditionalmicro—fabricationtechnique．Projectionmicro-stereo

2、lithographycanfabricatemicroscale3Dcomplexstructures、vimhighresolution．Atpresent，projectionmicro·stereolithogrphyisregarded嬲oneofthemostpromisingmicro—stereolithograpytechniquestOfabricatemicroparts．Inthispaper,wedevelopedadynamicmaskprojectionmicro·stereolithographysystem，itused

3、DigitalMicro-mirrorDevicesaSdynamicmaSk，andadoptedLEDarrayaSlightsource，whichspectralbandcanmatchwitlltheabsorptionspectraoftheresin．Tofabricatemicrostructureswithhighviscositycomposites，wedesignednewvatandcoatingsystem．Additional，anewdirectslicingmethodofCADmodelbaSedonAutoCADan

4、dcontrolsoftwareofthesystembasedonLabVIEWareproposed．ItisshownthatthelateralresolutionoftheSLsystemisdeterminednotonlybytheopticalresolution，butalsobythechemicalresponseofthephotocurableresin．Fromthemeasuredvaluesoftheopticalsystem’Sresolutionandthecomposites’workingcure，weknowth

5、atthelateralresolutionofOUt"systemis14micrometers．Theinfluenceofoxygenandthemethodeliminatedoxygeninhibitionwerestudied；somepreliminaryexperimentswereexperiencedandamicro-gearWaSfabricatedsuccessfullybyprojectionmicro·stereolithographysystemdevelopedbyourselves．KeyWords：projectio

6、nmicro—stereolithography,DigitalMicro·mirrorDevice(DMD)，photosensitiveresin，resolution．ⅡWrittenbyZhougengxiaSupervisedbyGujihua目录第一章绪论⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．．⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯。11．1微细加工技术⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．11．2微立体光刻技术⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯21．2l线扫描微立体光刻技术⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯

7、⋯⋯⋯⋯⋯⋯．21．22面投影微立体光刻技术⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯41．23面投影微立体光刻技术的优点⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．51．3DMD动态掩膜面投影微立体光刻技术的研究进展⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．61．4本文的研究目标和主要研究内容⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯8参考文献=．．⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯10第二章基于DMD动态掩膜微立体光刻系统设计的基本原理⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．132．1掩膜产生的基本原理⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯132．1lDMD的

8、基本结构⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．132．12DMD的工作