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1、------------------------------------------------------------------------------------------------(英文)无掩膜光刻的模式生成系统ICCAS2005June2-5,KINTEX,Gyeonggi-Do,KoreaRegion-basedPatternGeneratingSystemforMasklessPhotolithographyYounghunJin*,KiwonPark*,JaemanChoi*,SangjinK
2、im**,ChanggeunAn**,andManseungSeo**Dept.ofComputer-AidedMechanicalDesignEng.,TongmyongUniv.ofI.T.,Busan,Korea(Tel:+82-51-610-8351;E-mail:sms@tit.ac.kr)**ThinfilmTechnologyGroup,LGPRC,LGElectronics,Gyunggido,Korea(Tel:+82-31-660-7332;E-mail:cgan@lge.com)Abstra
3、ct:InthemasklessphotolithographybasedontheDigitalMicromirrorDevice(DMD)byTexasInstrumentsInc.(TI),themicromirrorarrayworksasavirtualphotomasktowritepatternsdirectlyontoFlatPanelDisplay(FPD)athighspeedwithlowcost.However,itisneithersimpletogenerateregion-based
4、patternsforthemicromirrorarraynoreasytodeliversequencesofpatternsforthemicromirrorcontroller.Moreover,thequalityoflithographyyieldstheprecisesynchronizationbetweengeneratingsequenceofpatternsand——————————————————————————————————————---------------------------
5、---------------------------------------------------------------------irradiationrateoffmicromirrors.Inthisstudy,theregion-basedpatterngeneratingsystemformasklessphotolithographyisdevised.Toverifysalientfeaturesofdevisedfunctionalities,theprototypesystemisimpl
6、ementedandthesystemisevaluatedwithactualDMDbasedphotolithography.Theresultsshowthatproposedpatterngeneratingmethodisproperandreliable.Moreover,thedevisedregion-basedpatterngeneratingsystemisrobustandpreciseenoughtohandleanypossibleuserspecifiedmandateandtoach
7、ievethequalityofphotolithographyrequiredbyFPDmanufacturer.Keywords:Photolithography,Maskless,DigitalMicromirrorDevice(DMD),FlatPanelDisplay(FPD)generatingsystemthatcreatesphotolithographicregionforthe1.INTRODUCTIONmicromirrorarray.Theregion-basedpatterngenera
8、tingsystemRecently,theDigitalMicromirrorDevice(DMD)byTexasformasklessphotolithographyisproposed.InstrumentsInc.(TI)hasbroughttheinnovationonthedigitalThedevisedpatternsequencedatagenerati
