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1、MasklessLithographyUsingDrop-On-DemandInkjetPrintingMethodYanWang,JeffreyBokor,ArthurLeeElectricalEngineeringandComputerSciencesDepartment,UniversityofCaliforniaatBerkeley,Berkeley,CA94720,USAABSTRACTWritingprocesspatternsdirectlyonasubstratewithsmal
2、lliquiddropletsgeneratedbyDrop-On-Demand(DOD)inkjetdevicesoffersalowcost,non-contact,lowtemperature,flexible,anddatadrivenpatterningapproach.Existinginkjetprintheadshavealimitednumberofinkjetdevices,whichgeneratedropletsonthescaleoftensofmicrons.Inou
3、rresearch,wehavedevelopedamonolithicinkjetprintheadformasklesslithographybasedonsiliconmicro-machiningtechnology.Thisprintheadiscomposedofalargearrayofthermalbubbleinkjetdevicesfabricatedonasinglesiliconwafer.Ahigh-resolutionvideoimagingsystemhasreco
4、rdedstablegenerationofwaterdropletsdownto3.5µm.Aupatternsassmallas8µmhavebeenformedonsiliconsubstratesbyprintingwithsuspensionsofAunano-particles.Smallerdropletdimensionsextendingtothenano-scaleissupportedbytheoreticalanalysis.Thisprintheadtechnology
5、canformthebasisofamasklesslithographysystemwithmoderatethroughputforbuildingmicroandnano-scaleelectroniccircuitsandMEMSdevices.Keywords:Masklesslithography,inkjetprinting,drop-on-demand,monolithicprinthead,thermalbubblejet1.INTRODUCTIONMicro-fabricat
6、ionofelectronicandmechanicalstructuresistypicallyatime-consumingandexpensiveprocessbecauseofthecomplicatedopticallithographysystem.Fabricatingprocesspatternsusingsmallfluidicdropletsgeneratedfrom1,2Drop-On-Demand(DOD)inkjetdevices,similartocommercial
7、inkjetprinters,couldbeanattractivealternativeapproach.AschematicdiagramofamasklesslithographysystemusingtheDODinkjetprintingmethodisshowninFig.1.Inthissystem,aprintheadwithanarrayofinkjetdevicesejectsmaterialdropletsundercomputercontrol.Eachdropletta
8、kesaballistictrajectoryandlandsonacertainpositiononasubstrate,whichmovesinatwodimensionalfashion.Theadjoiningdropletswilloverlapwitheachotherandformpatternsthatcouldbeusedeitherasanactivedevicelayerorasamaskforsubsequentprocesssteps.Besideseliminatin
