SEMI F29-0997 TEST METHOD FOR PURGE EFFICACY OF GAS SOURCE SYSTEM PANELS

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1、4SEMIF29-0997N/A©SEMI1997TESTMETHODFORPURGEEFFICACYOFGASSOURCESYSTEMPANELS1Purposeentinstrumentswillreportdifferentpeakheightswhenmeasuringidenticalcontaminantspikes.Therefore,1.1ThisdocumentdeÞnesthepurgeefÞcacytestresultsoftestsshouldonlybecomparedwhensimila

2、rmethodrecommendedfordeterminingtheminimumanalyzersareused.acceptablelevelofpurgeefÞcacyforgassourcesys-temsusedinsemiconductormanufacturing.Itisalso4ReferencedDocumentsintendedasanaidtotheprocurementofgassourceequipment.None.NOTE:UsersofthisspeciÞcationareenc

3、ouragedto5TerminologysubmitsuggestedrevisionsorothercommentstoSEMI.5.1cleandryair(CDA)ÑFilteredairÞlteredto0.02mmanddriedtoadewpointofatleast-80¡C.2Scope5.2drydownÑRemovalofresidualmoistureinagas2.1ThisspeciÞcationappliestogassourceequipmentdeliveryordistribut

4、ionsystem,oftenaccomplishedbyusedinsemiconductormanufacturingfacilitiesandßowingastreamofhighpuritydryinertgascontinu-comparableresearchanddevelopmentareas.Itouslythroughthesystemforanextendedperiodofincludescontaminationtestingrequirementsforgastime.sourcesys

5、tems.5.3dwelltimeÑThetimeforwhichvacuumorpres-2.2Thetestscoveredbythisdocumentareasfollows:sureisappliedduringtheevacuationorpressurizationstepsofapurgeoperation.2.2.1PurgeefÞcacywithanon-interactivegasusingmanufacturers'standardpurgesequence.5.4interactivegas

6、ÑAgasthatwillreadilyadsorbtothesurfaceofavesselusedtocontainortransportit.2.2.2PurgeefÞcacywithanon-interactivegasusingExamplesofinteractivegasesarehydrogenchloridethetestmethodspeciÞedpurgesequence.andmoisture.2.2.3PurgeefÞcacywithaninteractivegasusing5.5non-

7、interactivegasÑAgasthatwillnotadsorbmanufacturers'standardpurgesequence.tothesurfaceofavesselusedtocontainortransportit.2.2.4PurgeefÞcacywithaninteractivegasusingtheExamplesofnon-interactivegasesareoxygenandtestmethodspeciÞedpurgesequence.nitrogen.5.6ppbÑMolar

8、partsperbillion,sameasppbv.3Limitations5.7ppmÑMolarpartspermillion,sameasppmv.3.1Thedocumentisnotintendedtodeterminethesafeoperationofagassourcesystem.Thetestmethod5.8pigtailÑThepi