BS IEC 62047-32-2019 Semiconductor devices — Micro-electromechanical devices Part 32_ Test method for the nonlinear vibration of MEMS resonators

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1、BSIEC62047-32:2019BSIStandardsPublicationSemiconductordevices—Micro-electromechanicaldevicesPart32:TestmethodforthenonlinearvibrationofMEMSresonatorsBSIEC62047-32:2019IEC旧C62047-32Edition1.02019-01INTERNATIONALSTANDARDNORMEINTERNATIONALEcolourinsideSemicond

2、uctordevices-Micro-electromechanicaldevices-Part32:TestmethodforthenonlinearvibrationofMEMSresonatorsDispositifsasemiconducteurs-Dispositifsmicroelectromecaniques-Partie32:Methoded’essaipourlavibrationnonlineairedesresonateursMEMSINTERNATIONALELECTROTECHNIC

3、ALCOMMISSIONCOMMISSIONELECTROTECHNIQUEINTERNATIONALEICS31.080.99ISBN978-2-8322-6455-3Warning!Makesurethatyouobtainedthispublicationfromanauthorizeddistributor.Attention!Veuillezvousassurerquevousavezobtenucettepublicationviaundistributeuragree.®Registeredtr

4、ademarkoftheInternationalElectrotechnicalCommissionMarquedeposeedelaCommissionElectrotechniqueInternationaleBSIEC62047-32:2019-2-IEC62047-32:2019®IEC2019CONTENTSFOREWORD........................................................................................

5、..........................................................31Scope.....................................................................................................................................................52Normativereferences......................

6、...................................................................................................53Termsanddefinitions.........................................................................................................................54Testparameters

7、ofnonlinearvibrationoftheresonators..........................................................55Testmethodfortheamplitude-frequencyresponseandphase-frequencyresponseofthenonlinearvibration......................................................................

8、.............................................65.1Testsystem................................................................................................................................65.2Testcondit