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《磁控溅射制备钛薄膜的结构和光学性质-论文.pdf》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、第28卷第4期福建师范大学学报(自然科学版)Vo1.28No.42012年7月JournalofFujianNormalUniversity(NaturalScienceEdition)Ju1.2012文章编号;1000.5277(2012)04—0031—05磁控溅射制备钛薄膜的结构和光学性质吴杨微,郑明志,林丽梅,林建平,郑卫锋,赖发春(1.福建师范大学物理与光电信息科技学院,福建福州350108;2.宁德师范学院物理与电气工程系,福建宁德352100)摘要:利用直流磁控溅射技术在石英基片上沉积厚
2、度为35~112nm的钛薄膜.采用x射线衍射仪和原子力显微镜分别对薄膜的微结构和表面形貌进行观测,用分光光度计测量样品的透射和反射光谱.选用德鲁特光学介电模型,通过拟合样品的透射和反射光谱数据的方法求解钛薄膜的折射率、消光系数和厚度.结果表明,随着厚度的增加,(100)面衍射峰强度增强,薄膜的结晶性能提高;膜厚为56nm时,样品的表面为多孔结构,而大于56nm时表面为连续膜的球形颗粒结构;随膜厚的增加,表面颗粒直径逐渐增大,表面粗糙度减小.在40o~2000nm波长范围内,薄膜的透射率随膜厚的增加而减
3、小,反射率升高;折射率在2.5与3.4之问,消光系数在0.7与1.4之间,折射率和消光系数均随膜厚的增加而增加.关键词:钛;薄膜;光学性质;表面形貌中图分类号:0484.4文献标识码:AStructuralandOpticalPropertiesofTitaniumFilmsPreparedbyMagnetronSputteringWUYang—wei,ZHENGMing—zhi,LINLi—mei,LINJian—ping,ZHENGWei—feng,I,AIFa—chun(1.SchoolofPh
4、ysicsandOptoElectronicsTechnology,FujianNormalUniversity,Fuzhou350108,China;2.DepartmentofPhysicsandElectricengineering,NingdeNormalUniversity,Ningde352100,China)Abstract:Titaniumfilmswiththicknessrangingfrom35nmto112nmweredepositedonquartzsubstratesbyd
5、irectcurrentmagnetronsputtering.Themicrostructure,surfacemorphology。transmittance,andreflectanceofthefilmsweremeasuredbyX—raydiffraction,atomicforcemicroscopy,andspectrophotometer,respectively.BasedontheDrudeopticaldi—electricmodel,therefractiveindex,ex
6、tinctioncoefficient,andthicknessofthefilmwerecal—culatedfromtransmittanceandreflectan‘cedata.T、heresultsshowthatthecrystallineperfor—manceenhancesandtheintensityofthe(100)diffractionpeakincreaseswiththeincreaseofthickness.Whenthicknessis56nm,thereareman
7、rporesonthefilmsurface.Thefilmisacontinuousstructureandtherearemanyglobularparticlesonsurface.Surfaceparticlesizeincreasesandsurfaceroughnessdecreaseswithincreasingthicknesswhenthicknessislargerthan56nm.Intherangeof400~2000nmwavelength,transmittancedecr
8、easesandre—flectanceincreaseswiththeincreaseofthickness.RefractiveindexiSbetween2.5and3.4,andextinctioncoefficientiSbetween0.7and1.4.Bothrefractiveindexandextinctioncoeffi—cientincreasewithincreasingthickness.Keywords:titanium;fi
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