JIS Z 8750-2009 真空計校正方法.pdf

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1、Z8750：2009目次ページ序文···············································································································································································11適用範囲····························································································

2、·····································································12引用規格·································································································································································13用語及び定義··············································

3、···········································································································24量記号，記号及び略号·········································································································································45一般原則····························

4、·····································································································································46要求事項·······················································································································································

5、··········46.1校正容器の設計··················································································································································46.2真空計の取付配管···············································································································

6、·······························56.3排気系及び気体導入系······································································································································66.4校正気体·······································································································

7、·······················································66.5温度計及び環境条件··········································································································································66.6参照真空計·············································