器件和工艺数值模拟-求解.ppt

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1、SolutionSpecificationMODELSMODELS复合统计分布电离碰撞电离迁移率复合:SRH

2、CONSRHSRH复合/与浓度有关的SRH复合R.TUNNEL带带隧穿AUGER俄歇复合能带相关的模型:BGN禁带变窄效应FN.CURFowler-NordheimtunnelingmodelBOLTZMAN

3、FERMIDIR统计分布INCOMPLE不完全电离IMPACT.I碰撞电离(电场相关)II.TEMP碰撞电离(载流子温度相关)BTBT隧穿引起载流子增加迁移率:CONMOBANALYTICARORAC

4、CSMOBPHUMOBLSMMOBSRFMOBSRFMOB2UNIMOBPRPMOBLSMMOBGMCMOBTFLDMOBHPMOBHPMOBFLDMOBTMPMOB#ND.MOBC.ND.MOB=#E.EFFECTEJ.MOBILEHSCAT量子效应:QM.PHILIQM.NORP=QM.EFIEL=QM.METHO=热电子和栅电流:GATE1GATE2GATE.SURGATE.GEN=GATE.TEM自热效应(晶格温度):TMPDIFF热扩散项参数ET.MODEL能量平衡方程与各种

5、模型相关EF.TMPEFI.TMPCOMP.ETEBLT.HTTMPTAUWNTMPTAUWPEB.SRH.G3KT.LTECII.LATHJSC2HJTEMHJTUNTEMPERAT=SYMBOLICTheSYMBOLICstatementperformsasymbolicfactorizationinpreparationfortheLUdecompositionsinthesolutionphaseoftheprogram.SYMBOLIC算法:NEWTON

6、GUMMEL载流子种类:CARRIERS=<

7、N>ELECTRON

8、HOLES温度:ELE.TEMP[COUP.ELE]HOL.TEMP[COUP.HOL]LAT.TEMP[COUP.LAT]后处理方式求能量平衡方程:EB.POST代数方程的求法:MIN.DEGRILUCGSBICGSSTRIPMETHODTheMETHODstatementsetsparametersassociatedwithaparticularsolutionalgorithmchosenintheSYMBOLICstatement.METHOD误差LU分解参数Gummel法参数/Ne

9、wton法参数迭代次数ITLIMIT=误差定义XNORMRHSNORMXRNORMNODE.ERR=PX.TOLER=CX.TOLER=PR.TOLER=CR.TOLER=LIMIT误差定义ILUCGSSolverParametersILU.ITER=ILU.TOL=ILU.XTOL=Gummel’sMethodParametersDVLIMIT=DAMPEDDELTA=DAMPLOOP=DFACTOR=ICCGLU1CRIT=LU

10、2CRIT=MAXINNER=SINGLEPACCELERAACCSTART=ACCSTOP=ACCSTEP=Newton’sMethodParametersAUTONR[NRCRITER=][ERR.RAT=]][CONT.RHS[ITRHS=]][CONT.PIV][{CONT.ITL

11、STOP.ITL}][CONT.STK][STACK=][ACONTINU=][TAUTO][2NDORDER][TOL.TIME=][L2NORM][DT.MI

12、N=][EXTRAPOL][CARR.MIN=][CARR.FAC=][N.DVLIM=][N.DVMAX][N.DAMP]EnergyBalanceParameters[ETX.TOLE=][ETR.TOLE=][N.MAXBL=][N.MAXEB=]LatticeTemperatureAAMParameters[LTX.TOLE=][LTR.TOLE=][LTX.FACT=][LTR.FACT=][MAX.TEMP=]SOLVEThe

13、SOLVEstatementinstructsMedicitoperformasolutionforoneormorespecifiedbiaspoints.SOLVEInitialGuesses,Biasing,andFermiPotentials[{INITIAL

14、PREVIOUS

15、PROJECT

16、LOCAL

17、P.LOCAL}][{V(name1)=