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1、研究生课程考核试卷科目：专业外语教师：陈刚姓名：张洪江学号：20140802054专业：微电子学与固体电子学类别：学术上课时间:2014年10月至2014年12月考生成绩：卷面成绩平时成绩课程综合成绩阅卷评语：阅卷教师(签名)TheSearchofEarthquakeEarlyWarningandVibrationPickingDeviceBasedonMEMSLaibaoYu,ZhigaoChen,XiongweiWu,HanLv(KeyLaboratoryofEarthquakeGeodesy,InstituteofS
2、eismology,CEA,Wuhan430071)(WuhanBaseofInstituteofCrustalDynamics,CEA,Wuhan430071)Abstract:AsetofearthquakeearlywarningandvibrationpickingdevicebasedontheMEMStechnologywasdesigned.ThedevicewastestedbyusingGSK-166vibrationtableandcomparedwithstandardsensorAC43throug
3、hthemetrologicalverification,andthe resultsshowedthattheperformanceparametersofthedevice meettherequirementsofearthquakeearlywarningsystembasically.KeyWords:MEMStechnology,earthquakeearlywarning,vibrationpickingdevice1IntroductionPhysicsoftheearthisasciencebasedon
4、observationandmeasurement,seismologyhasarapiddevelopmentsincetheinstrumenthaveemergedandthemethodbasedontheinstrumentobservationwasestablished.Afterthedevelopmentofseveralgenerations,seismometerhavedevelopedfromtherecordbymagnifyingsmokeusinginitialmechanicallever
5、tomeasurementIntegratedelectronictechnologyandcomputertechnology,improvedthefrequencybandrangeanddetectingprecisionsubstantially,anditmaketheseismologicalresearchanddevelopmententeranewstage.Withtheresearchanddevelopmenttoseismologyscienceandrequirementofspacedete
6、ctiontothemoonandthemars,combiningwithdevelopmentofthemodernelectronicandcomputertechnology,modernseismicsensorsneedtodeveloptowardslowpowerconsumption,miniaturization,chip,lowcostandhighreliability,andbeabletogetfullbandobservationandmeasurement.Modernmeasurement
7、instrumentbasedonmechanicalhammerhavesomeadvantagessuchashighlowresolution,largedynamicrange,butshowthedeficienciesintheapplication.MicroElectronicMechanicalSystemisbasedontheintegratedcircuittechnologyandmicromechanicalprocess,andthenintegratethemechanicalcompone
8、nts,opticalsystem,drivercomponents,electroniccontrolsystemasawholeunit,hassmallvolume,lightweight,smallconsumption,lowcost,easytointegrateandstrongoverl
