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ID:41385370
大小:1.84 MB
页数:27页
时间:2019-08-23
《MOS -最详细的介绍》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、PowerMOSFETBasicandApplicationSongLiuMOSFETBasicMOSFET:MetalOxideSemiconductorFieldEffectTransistorisathree-terminaldeviceswhichinbasictermbehavesasavoltagecontrolledswitch(压控).氧化层MetalLayer:门极(现在多晶硅Polysilicon形成门极)氧化隔离层OxideIsolationLayer:防止电流在门极和其
2、它两电极间D、S极流动,但并不阻断电场ElectricField.半导体层SemiconductorLayer:取决于门极电压,阻止或允许电流在D/S间流通DrainGateSourceDrainSourceGateCircuitSymbolPackagePinLayoutMOSFETBasicMOSFET半导体特征MOS是多子单极型器件(无少子),受温度影响小,PMOS多子是空穴,NMOS多子是电子,MajorityCarrier.反转层:InversionLayerDMOS:双重扩散M
3、OS,DoubleDiffused氧化层相当于介电质DielectricMaterial(Dielectricconstant)掺杂Doged,高掺杂浓度区域Heavilydopedregion半导体层:依赖于门极电压,阻断或允许电流在漏极D和源极S间流动SignalMOSFETStructure1.平面横向(Lateral)导电型MOSFET管Vdd增加或减少门极电压会增大或减少N沟道的大小,以此控制器件导通没有充分应用芯片的尺寸,电流和电压额定值有限LoadCMOS工艺,适合低压信
4、号管,如微处理器,运放,数字D电路Driver低的电容,快的开关速度GSinversionlayer沟道D-MOSFETStructure2.平面垂直导电型功率MOSFET管D-MOSFET(VDMOSFET):VerticalDouble-diffusedMOSFET,垂直导电双扩散,70年代商业应用平面Planar门极结构:n-typechannelisdefinedbythedifferenceinthelateralextensionofthejunctionsunderthegat
5、eelectrode.ThevoltageblockingcapabilityisdeterminedbythedopingandthicknessoftheN-driftregion.多个单元结构。具有相同RDS(on)电阻MOSFET并联,等效电阻为一个MOSFET单元RDS(on)的1/n,裸片面积越大其导通电阻越低。Thedriftregionresistanceincreasesrapidlywithincreasingblockingvoltage。Double-diffused??D
6、-MOSFETStructure2.平面垂直导电型功率MOSFET管D-MOSFETStructure2.平面垂直导电型功率MOSFET管Thechannellengthofthisdevicecouldbereducedtosub-microndimensionsbycontrollingthediffusiondepthsoftheP-baseandN+sourceregionswithoutresortingtoexpensivelithographytools.Thedevicefa
7、bricationprocessreliedupontheavailableplanargatetechnologyusedtomanufactureCMOSintegratedcircuits.ThefastswitchingspeedandruggednessoftheD-MOSFETstructureweresignificantadvantagescomparedwiththeperformanceoftheavailablebipolarpowertransistorLVMOSRDSO
8、NisconstrainedbythesignificantchannelresistanceduetothelowchanneldensityandtheJFETregioncontribution.JFETregionsubstantiallyincreasestheinternalresistanceU-MOSFETStructure3.沟槽垂直导电型MOSFET管V型沟槽:不容易生产,V尖角容易形成高的电场.U型沟槽:U-MOSFET结构90年代商业化应
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