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1、HANDBOOKOFCHEMICALVAPORDEPOSITION(CVD)Principles,Technology,andApplicationsSecondEditionbyHughO.PiersonConsultantandSandiaNationalLaboratories(retired)Albuquerque,NewMexicoNOYESPUBLICATIONSParkRidge,NewJersey,U.S.A.WILLIAMANDREWPUBLISHING,LLCNorwich,NewYork,U.S.A.Co
2、pyright©1999byNoyesPublicationsNopartofthisbookmaybereproducedorutilizedinanyformorbyanymeans,elec-tronicormechanical,includingphotocopying,recordingorbyanyinformationstorageandretrievalsystem,withoutpermissioninwritingfromthePublisher.LibraryofCongressCatalogCardNu
3、mber:99-26065ISBN:0-8155-1432-8PrintedintheUnitedStatesPublishedintheUnitedStatesofAmericabyNoyesPublications/WilliamAndrewPublishing,LLCNorwich,NewYork,U.S.A.10987654321LibraryofCongressCataloging-in-PublicationDataPierson,HughO.Handbookofchemicalvapordeposition/by
4、HughO.Pierson.--2nded.p.cm.Rev.ed.of:Handbookofchemicalvapordeposition(CVD),c1992Includesbibliographicalreferences.ISBN0-8155-1432-81.ChemicalvapordepostionHandbooks,manuals,etc.2.Vapor-platingHandbook,manuals,etc.I.Pierson,HughO.Handbookofchemicalvapordeposition(CV
5、D)II.Title.TS695.P521999671.7'35--dc2199-26065CIPAbouttheAuthorHughPiersonispresentlyaprivateconsultantinChemicalVaporDeposition.HewasformerlytheheadoftheDepositionLaboratoryattheSandiaNationalLaboratoriesandisnowretired.Sincethen,hehasbeenaconsultanttotheU.S.StateD
6、epartmentinSouthAmerica;UltrametinPacoima,California;LOFinToledo,Ohio;theGorhamInstituteinMaine;REIinWhittier,California;THGoldschmidtAGinGermany;andtomanyothercompanies.AgraduateoftheUniversityofParisandtheFrenchNavalCollege,Mr.Piersonhaspublishedoveronehundredtech
7、nicalpublicationsinthefieldofChemicalVaporDeposition.HehasalsobeenacontributortoabookonChemicallyVaporDepositedCoatingspublishedbytheAmericanCeramicSociety,andhasauthoredthreebooks.NOYESPUBLICATIONSWILLIAMANDREWPUBLISHING,LLCMATERIALSSCIENCEANDPROCESSTECHNOLOGYSERIE
8、SSeriesEditorsRointanF.Bunshah,UniversityofCalifornia,LosAngelesGaryE.McGuire,MicroelectronicsCenterofNorthCarolinaStephenM.Rossnagel,IBMT
