structural and optical properties of tellurium films obtained by chemical vapor deposition(cvd)

structural and optical properties of tellurium films obtained by chemical vapor deposition(cvd)

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时间:2018-07-08

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1、Structuralandopticalpropertiesoftelluriumfilmsobtainedbychemicalvapordeposition(CVD)SciencePressAvailableonlineatwww.sciencedirect.corn…cE@…….Trans.NonferrousMet.Soc.China16(2006)693—699TransactionsofNonferrousMetalsSocietyofChinaWWW.CSU.edu.cn/ysxb/Structuralan

2、dopticalpropertiesoftelluriumfilmsobtainedbychemicalvapordeposition(CVD)MAⅥI-liaIl(马玉天)I,2,GONGZhu.Qing(~青),XUwei-Hong(徐卫红),HUANGJian(~坚)1.SchoolofMetalhrgicalScienceandEngineering,CentralSouthUniversity,Changsha410083,China;2.JinchuanGroupLtd,Jinchang737100,Chi

3、naReceived18July2005;accepted14March2006Abstract:Telhriumthinfilmswerepreparedbythechemicalvapordepositionmethod.Thestructure,surfacemorphologyandopticalpropertiesoftheTeminfilmswereanalyzedbypowderX—raydiffraction,scanningelectronmicroscopy,FTIRtransmission.UV/

4、vIS/NIRtransmissionandreflectance.Theresultsshowthatthefilmsstructuralandopticalpmpertiesareinfluencedbymanyfactorssuchasfilmthickness,crystallitesizeandsubstratetemperature.Thefilmsasthickasll卜l33nlnhavehigbIRtransmissionacrossthefull8-13panbandandhighlyblockin

5、ginthesolarspectralregionelsewhere.whichindicatesthatTefilmsthicknessinmisregioncanbeusedasgoodsolarradiationshieldsinradiativecoolingdevices.Keywords:telluriumthinfilm;chemicalvapordeposition;solarradiationshields;radiativecooling1IntroducfionTethinfilmshavebee

6、nextensivelyusedinvariOBStechnologicalareas,especiallyinmicroelectronicdevicessuchasgassensor[卜3],opticalinformationstorage[4]andotherapplications【5—7].AlltheseapplicationsareduetoremarkablephysicalpropertiesofTesuchas1owband—gapandtransparencyintheinfraredregio

7、n.Inadditiontoabovephysicalproperties,Tefilmshaveanotherspecialcharacteristic,namelyspectralselectivity,whichcanbeusedasshieldinradiativecoolingsystem[8—13].Radiativecoolingistheoneamongtodayschallengesinmaterialsscienceresearch.ItOccurswhenabodygetscoldbyloosin

8、genergythroughradiativeprocesses.Thephenomenonofradiativecoolingusesthefactthatthetherma1energyemittedbyaclearskyinthe''atmosphericwindowregion"(8—13Ixm)[14]ismuchles

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