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1、ChemicalBoundaryLayersinCVDI.IrreversibleReactionsM.H.J.M.deCroonandL.J.GilingDepartmentofExperimentalSolidStatePhysicsIII,R.I.M.,FacultyofScience,UniversityofNijmegen,6525EDNijmegen,TheNetherlandsABSTRACTBecauseofthecouplingofthetemperaturedependenceofgas-phasereactionrateconstant
2、swiththesteeptempera-turegradient,presentinmostCVDreactors,athinchemicalreactionboundarylayercanbedefinedinthegasphasejustabovethesusceptor.Thisboundarylayerwillbepresentunderalloperatingconditions,includinglowerpressuresandir-respectiveofthekineticregimeofthedepositionreactionorth
3、eexistenceofflowandtemperatureboundarylayers.Usingthischemicalboundarylayerconceptitprovestobepossibletoderivedepositionrateequationsnotonlyforthegas-phasetransportlimitedregimebutalsoforthegas-phasekineticregime,orforthecasewheresurfacereactionsareratelimiting.Chemicalvapordeposit
4、ion(CVD)isanimportanttech-andthewidthofthereactormuchlargerthanh;thus,be-niquenowadaystogrowelectronicallyactiveandinsulat-causeofthelargeaspectratiowemaydescribethisreactoringlayersforallkindofsolid-statedevices.Studiesthatasatwo-dimensionalsystemwithsufficientaccuracy.Inhavebeenp
5、erformedoverthelastfewdecadeshavethissystem,thesuscept0rwhichisatthebottomwall,ismainlydealtwithgrowth,doping,ortechnicalaspects.heldattemperatureTs,whereastheupperwalliscooledFlowdynamics,reactordesign,anddepletioneffectsalsoandkeptataconstanttemperatureTo,whichwesupposehavereceiv
6、edsomeattentiontodate,andinterestisstilltobeequaltotheinlettemperatureofthegases.Alargegrowing(1-13),soonecansaythatunderstandinginthistemperaturegradient,therefore,existsovertheheightofareaisbeingbuiltup.Ontheotherhandthecombinationthereactor.offlowwithchemistryisalmostablankarea.
7、BecausetheThereactantconcentrationsinthereactorareassumedflowdynamicsoftheCVDprocessalreadyisverycom-tobemuchsmallerthantheconcentrationofthecarrierplex,oneisinclinedtostudythesecombinedphenomenagas.Fromthisitfollowsthattheflowandtemperaturepro-bynumericalanalysis(1-9).Althoughtheg
8、raphicalpresen-filesarecom
