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时间:2019-07-11
《Micrometre-scale silicon electro-optic modulator%0A》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、Vol435
2、19May2005
3、doi:10.1038/nature03569LETTERSMicrometre-scalesiliconelectro-opticmodulator1111QianfanXu,BradleySchmidt,SameerPradhan&MichalLipsonMetalinterconnectionsareexpectedtobecomethelimitingfactortheresonancewavelengthismodified,whichinducesastrongfortheperformanc
4、eofelectronicsystemsastransistorscontinuemodulationofthetransmittedsignal.Theeffectiveindexofthetoshrinkinsize.Replacingthembyopticalinterconnections,atringismodulatedelectricallybyinjectingelectronsandholesusingadifferentlevelsrangingfromrack-to-rackdowntochip-to-chipp-
5、i-njunctionembeddedintheringresonator.Figure1(inset)showsandintra-chipinterconnections,couldprovidethelowpowerthecross-sectionofthisribwaveguide.Itconsistsofastripwaveguide14dissipation,lowlatenciesandhighbandwidthsthatareneeded.formedona50-nm-thickslablayer.Becausetheth
6、icknessoftheslabTheimplementationofopticalinterconnectionsreliesontheismuchsmallerthanthewavelengthpropagatinginthedevicedevelopmentofmicro-opticaldevicesthatareintegratedwith(,1.5mm),themodeprofileofthiswaveguideisveryclosetothatthemicroelectronicsonchips.Recentdemonstra
7、tionsofsiliconofthesiliconstripwaveguide.Thehighlydopedp-andn-regionsare57891112,13low-losswaveguides,lightemitters,amplifiersandlasersdefinedaroundtheringusingionimplantation.Ohmiccontactsareapproachthisgoal,butasmallsiliconelectro-opticmodulatordepositedonthedopedregions
8、.Tominimizeabsorptionlosses,thewithasizesmallenoughforchip-scaleintegrationhasnotyetbeendopedregionsareformedapproximately1mmawayfromtheringdemonstrated.Hereweexperimentallydemonstrateahigh-speedresonator,ensuringthattheoverlapoftheresonatingmodewiththeelectro-opticalmod
9、ulatorincompactsiliconstructures.The26dopedregionsisminimal.modulatorisbasedonaresonantlight-confiningstructurethatWefabricatedthep-i-nringresonatoronasilicon-on-insulatorenhancesthesensitivityoflighttosmallchangesinrefractivesubstratewitha3-mm-thickburiedoxidelayer.Botht
10、hewaveguideindexofthesiliconandalsoenableshigh-speedoperation.Thecouplingtotheringandthatformingthering
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