Nitrogen in Silicon

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1、JOURNALOFAPPLIEDPHYSICSVOLUME30.NUMBER3MARCH.1959NitrogeninSiliconW.KAISERANDC.D.THURMONDBellTelephoneLaboratories,Inc.,MurrayHill,NewJersey(ReceivedAugust15,1958)LiquidsiliconhasbeenexposedtogaseousambientscontainingvaryingconcentrationsofN2orNH,.Undercertainconditions,SiaN.needlesm

2、aybegrownonthesurfaceandintothebodyofthemelt.Themoltenzoneofsiliconwassupportedbetweentworodsofsolidsilicon.Wehavefoundthattheconcentrationofni.troge~inm~l~ens.iliconwhichissaturatedwithrespecttosiliconnitrideatatemperaturenearthemeltmgpomtofslhconISaround1019atomspercm'.Duringthefre

3、ezingofthemelt,SiaN.precipitatesfromthesupersaturatedliquidphase.Theconcentrationofelectricallyactiveimpuritystatesinsilicongrownfrommeltscontainingaround1019atomspercm'ofnitrogenislessthan10"atomspercm'.1.INTRODUCTIONcontainerisneededforthemeltsinceitissuspendedbysurfacetensionbetwe

4、entwosiliconrods.AdditionalHEnitrideSi3N4istheonlywell-establishedsolidTphaseinthesilicon-nitrogensystem.Twootheradvantagesarethataseriesofexperimentscanbemadeonthesamerodbyplacingseveralzonesalongitssolidphases,SiNandSi3N2havebeenreported,'butlength,andadefinedflowofgascanbeestablis

5、hedtheirexistenceisverydoubtful.Therearetwomodifi•quicklyovertheliquidsurface.ThereactionbetweencationsofSiaN4ofverysimilarcrystalstructureandtheambientandliquidorsolidsiliconcanbeobservedthesamedensity(seeTable1).2.3Thebasicunitsarereadilythroughthefusedsilicajacket.slightlydistored

6、SiN4tetrahedralinkedinsuchawayTableIIsummarizes,qualitatively,theobservationsthateachnitrogenatomissurroundedbythreesilicononthereactionsofthemoltensiliconzonewithvariousatoms.ambients.InanumberofcasesthereactionproductThefactthatallotherelementsofgroupVdissolvewasanalyzedbyx-raypowd

7、erpatternandfoundtobeinsolidsiliconandproducedonorstatessuggeststhatamixtureofaand(3SiaN4.ThemoststrikingfeaturenitrogenshouldalsodissolveinsolidsiliconandbecomeofTableIIistheobservationthatverylittlereactionadonor.Thefollowingexperimentsdescribeouroccursbetweennitrogenandsiliconwhen

8、theN2attempt