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1、SensorsandActuatorsB123(2007)10711076Novelflexibleresistive-typehumiditysensorPi-GueySu∗,Chao-ShenWangDepartmentofChemistry,ChineseCultureUniversity,Taipei111,TaiwanReceived2August2006;receivedinrevisedform10November2006;accepted13November2006Availableonline8Decembe
2、r2006AbstractAnovelflexibleresistive-typehumiditysensorwasfabricatedthroughinsituco-polymerizationofmethylmethacrylate(MMA)and[3-(methacrylamino)propyl]trimethylammoniumchloride(MAPTAC)copolymeronapolyester(PET)substrate.Theactivationenergyforconductionandthecopolym
3、er/substrateinterfacewereusedtoexplainthedifferencesofhumiditysensingcharacteristicsofthesensorsfabricatedonaPETsubstrate,incomparisonwiththosefabricatedonanaluminasubstrate.Thehumiditysensingcharacteristicsoftheflexiblehumiditysensorcouldbecomparablewiththesensorfa
4、bricatedonanaluminasubstrate.Theflexiblehumiditysensorshowedacceptablelinearity(Y=−0.0327X+5.9345;R2=0.9351)betweenlogarithmicimpedance(logZ)andRHintherangeof1090%RH,lowhysteresis(within6.1%RH),goodresponse(45s)andrecoverytime(150s),andlong-termstability(120daysatle
5、ast),measuredat1V,1kHzand25◦C.©2006ElsevierB.V.Allrightsreserved.Keywords:Flexiblehumiditysensor;Insituco-polymerization;Substrateeffect;Interface;Sensingproperties1.IntroductionMostoftheresistive-typepolymerhumiditysensorsarefabri-catedbysynthesizingthepolymerfilms
6、andthencoatingthemonHumiditysensorsarewidelyusedinmeasurementandcon-aceramicsubstrate[510].Ceramicaluminahasgoodthermaltrolofhumidityinhumancomfortandamyriadofindustrialandchemicalstabilities,soitissuitableasasubstratematerialforprocesses.Theconstructionofagoodhumi
7、ditysensorisacom-humiditysensors.However,itisverydifficulttointegratemanyplexmatterbecausetherequirementsforahumiditysensingsensorsandcontrolsystemsonaceramicsubstrate.Recently,materialessentiallyincludelinearresponse,highsensitivity,fastsomepapershavebeenreportedth
8、eresultsofhumiditysensorsresponsetime,chemicalandphysicalstability,wideoperatingfabricatedonSiorSiO2/Sisubstrates[1117].Thesiliconsub-humidityran
