Improvement of micromachined SnO2 gas sensors selectivity by

《Improvement of micromachined SnO2 gas sensors selectivity by》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、SensorsandActuatorsB118(2006)276282ImprovementofmicromachinedSnO2gassensorsselectivitybyoptimiseddynamictemperatureoperatingmodeF.Parreta,Ph.Menini´a,∗,A.Martineza,K.Soulanticab,A.Maisonnatb,B.ChaudretbaLaboratoired’Analyseetd’ArchitecturedeSyst`emes(CNRS-

2、LAAS),7AvenueduColonelRoche,31077Toulouse,FrancebLaboratoiredeChimiedeCoordination(CNRS-LCC),205routedeNarbonne,31077ToulouseCedex4,FranceAvailableonline18July2006AbstractThisstudyshowstheinfluenceofshorttemperaturevariationsonthetransientresponseofananopar

3、ticularSnO2gassensor.Byconsiderationoftheshapeandtimeconstantsofthenormalizedresponsecurves,wecandifferentiatedifferentgasmixturesatappmlevel.Inthispaper,differentconcentrationsofCO(from50to200ppm)arewelldifferentiatedeveninhighlevelofC3H8andNO2concentrati

4、ons.Theshapesoftransientresponsesarealsomodifiedbyaddingdifferentcatalysts(Pt,Pd)inSnO2sensinglayer.Thisnewmethodofanalysisispromisingtoconceiveaselectivegasdetectorbasedoncombinationoftemperatureprofilesanddifferentsensitivelayers.©2006ElsevierB.V.Allrights

5、reserved.Keywords:Micromachinedgassensor;Temperaturecycling;Discriminantvariables1.IntroductionprofileappliedonheatingresistorinthegoaltoobservetheshapeofthesensortransientresponsesdependingofthesurroundingPreviousstudiesonthedevelopmentofgassensorsbasedona

6、tmosphere.Inasecondpart,itisshowntheinfluenceofdopingmetaloxideshavebeendesignedwithforobjectivetoreduceelementasPtandPd,addedatthesurfaceofSnO2sensinglayer,dimensionsandconsumption[1,2].Currently,withthecom-inordertoimprovetheCO-selectivity.binationofnanot

7、echnologyandmicroelectronicprocesses,itcanbepossibletoreducethepowerconsumptionwithlow2.Sensordescriptioncost.Previousstudieshavedemonstratedtheinteresttousethisgassensorintemperaturemodulation[35]improvingtheseThesensorusedinthisstudyisformedbyamicrohotpl

8、ateperformancesintermofselectivityandsensitivityforgassesplatformandananoparticularSnO2sensinglayer.Themicro-discrimination[6]andalsotoreducetheinfluenceofrela-hotplatearchitecture(Fig.1)wasinitiallydevelopedb