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1、ThinSolidFilms325(1998)254±258FormulationandcharacterizationofZnO:Sbthick-®lmgassensorsN.JayadevDayana,S.R.Sainkarb,R.N.Karekara,R.C.Aiyera,*aCenterforAdvancedStudiesinMaterialScienceandSolid-StatePhysics,DepartmentofPhysics,UniversityofPune,Pune-411007,
2、IndiabNationalChemicalLaboratory,Pune,IndiaReceived14May1997;accepted23January1998AbstractZnO:Sbbasedscreenprintedthick-®lmH2,COandCH4gassensorswerefabricated.FilmswererealizedonanaluminasubstratebymixingZnOwithleadborosilicateglassfritsasabinderandSbasa
3、catalyst.ItwasobservedthattheZnO:SbbasedsensorsweremoresensitivetothesegasesthanthepureZnOsensors.Theconductanceofthesensorincreasedlinearlywiththesquarerootofthegasconcentration.Thedependenceofthesensitivityontheamountoftheadditive(Sb)isdiscussed.Thesen
4、sorshavearesponsetimeof10s.MaterialcharacterizationwascarriedoutbyusingbulkX-raydiffraction(XRD)andsurfacemorphologybyscanningelectronmicroscopy(SEM).Ó1998ElsevierScienceS.A.AllrightsreservedKeywords:Sensors;Zincoxide;Hydrogen;Antimony1.Introductionrobus
5、tandrelativelyinexpensivehybridcircuitsformanypurposes[4,5].Lateron,thick-®lmtechnologyhasattractedWiththerecentawarenessofenvironmentalpollution,bythesensors®eldandlotofworkhasbeenpublishedinthethereisagrowingneedforareliableandinexpensivegaslasttwodeca
6、des[6,7].GassensorsbasedonSnO2[8±12],sensor.ThustheuseofsensorshasbeenincreasingatanZnO[13±16],etc.inthick-®lmform,havebeendevelopedastoundingrateinthelastfewdecadesforavarietyoffordetectionandcontrolofgasessuchasCO[8,9],H2purposessuchasdetectionofsmoke,
7、radiation,hazardous[8,11,12],H2S[17,18],NH3[19],etc.Metalandnon-gases,humidityetc.Atpresent,therearethreetypesofmetalcatalysts[20]areadded/incorporatedtoimprovethesemiconductorgassensordevicesviz.pellets,thin-andsensitivityandselectivityofthesensor.Mosto
8、fthegasthick-®lmtypes.sensorsdevelopedaredopedwithnoblemetalslikePt,Ingeneral,thesalientfeaturesofthesesemiconductorgasPd,etc.whichareexpensive.However,lowcostmetalsorsensorsareasfollows.Danglingbondsonthesurfaceofmetaloxi
