高通量条件下熔石英强光元件缺陷抑制理论与工艺研究

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1、分类号TH161学号14030041ＵＤＣ密级公开工学硕士学位论文高通量条件下熔石英强光元件缺陷抑制理论与工艺研究硕士生姓名钟曜宇学科专业机械工程研究方向精密工程指导教师戴一帆教授国防科学技术大学研究生院二〇一六年十一月InvestigationonhighfluencelaserdamageprecursorsandtheirmitigationinFusedsilicaOpticsCandidate：ZhongYaoyuAdvisor：DaiYifanAthesisSubmittedinpartialfulfillmentoftherequireme

2、ntsforthedegreeofMasterofEngineeringinMechanicalEngineeringGraduateSchoolofNationalUniversityofDefenseTechnologyChangsha，Hunan，P.R.China（November，2016）国防科学技术大学研究生院硕士学位论文目录摘要...........................................................................................................

3、..........iABSTRACT.........................................................................................................ii第一章绪论........................................................................................................11.1课题来源及研究意义................................

4、........................................................11.1.1课题来源................................................................................................11.1.2课题研究意义........................................................................................11.2强激光对熔石英元件损伤研究现

5、状...............................................................41.2.1激光损伤前驱体研究现状....................................................................41.2.2后处理工艺研究现状............................................................................71.3论文主要研究内容............................

6、...............................................................9第二章缺陷诱导损伤检测评价.........................................................................112.1缺陷检测评价.................................................................................................112.1.1扫描电子显微镜和原子力显微镜.

7、.....................................................112.1.2光热检测技术......................................................................................122.1.3激光损伤阈值测试..............................................................................142.2损伤性能—阈值的关联规律..................

8、........................................