熔石英元件纳米SiO2超光滑低缺陷射流抛光技术研究

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1、分类号TH161学号14030033ＵＤＣ密级公开工学硕士学位论文熔石英元件纳米SiO2超光滑低缺陷射流抛光技术研究硕士生姓名杨平工程领域机械工程研究方向精密工程指导教师李圣怡二〇一六年十一月StudyonUltrasmoothandLowDefectPolishingforSilicaWorkpieceUsingNanoparticleSiO2JetTechnologyCandidate：YangPingAdvisor：LiShengyiAthesisSubmittedinpartialfulfillmentoft

2、herequirementsforthedegreeofMasterofEngineeringinMechanicalEngineeringGraduateSchoolofNationalUniversityofDefenseTechnologyChangsha，Hunan，P.R.ChinaNovember，2016国防科学技术大学研究生院硕士学位论文目录摘要...............................................................................

3、..................................iABSTRACT........................................................................................................ii第一章绪论......................................................................................................11.1课

4、题来源与研究背景.....................................................................................11.1.1课题的来源............................................................................................11.1.2课题的研究背景与意义.................................................

5、.......................11.2国内外研究现状.............................................................................................21.2.1微射流抛光国内外研究现状................................................................21.2.2纳米射流抛光国内外研究现状.................................

6、...........................51.3论文研究主要内容.........................................................................................8第二章纳米SiO2射流抛光去除机理研究.........................................................102.1射流抛光碰撞模型...........................................

7、............................................102.2抛光颗粒粒径选取.......................................................................................122.2.1抛光颗粒粒径选取..............................................................................122.2.2抛光液种类............

8、..............................................................................152.3纳米SiO2射流抛光去除机理......................................................................152.3.