熔石英元件电感耦合等离子体加工关键工艺研究

《熔石英元件电感耦合等离子体加工关键工艺研究》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、分类号TH161学号14030002ＵＤＣ密级公开工学硕士学位论文熔石英元件电感耦合等离子体加工关键工艺研究硕士生姓名陈恒学科专业机械工程研究方向精密工程指导教师周林副研究员国防科学技术大学研究生院二〇一六年十一月StudyontheKeyTechnologiesofInductivelyCoupledPlasmaProcessingonFusedSilicaOpticsCandidate：ChenHengAdvisor：AssociateProf.ZhouLinAdissertationSubmittedinpartialfulfillmentoftherequiremen

2、tsforthedegreeofMasterofEngineeringinMechanicalEngineeringGraduateSchoolofNationalUniversityofDefenseTechnologyChangsha，Hunan，P.R.China（November，2016）国防科学技术大学研究生院硕士学位论文目录摘要..................................................................................................................iABST

3、RACT........................................................................................................iii第一章绪论......................................................................................................11.1课题来源及意义..............................................................

4、..............................11.1.1课题来源..............................................................................................11.1.2课题研究的背景和意义.......................................................................11.2国内外研究现状...........................................................

5、.................................31.2.1熔石英光学元件去损伤加工发展现状................................................31.2.2等离子体加工技术发展现状...............................................................51.3论文主要研究内容........................................................................................8第二章电感耦

6、合等离子体加工热场研究.........................................................102.1等离子体热源模型......................................................................................102.1.1建立热源模型....................................................................................102.1.2热源模型优化..............

7、......................................................................112.2等离子体作用下工件温度场建模...............................................................122.2.1熔石英材料热传导描述.....................................................................122.2.2等离子体作用下的温