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1、上海交通大学硕士学位论文半导体行业MES的研究与应用姓名：何月华申请学位级别：硕士专业：软件工程指导教师：曹健;王剑鸿20070901上海交通大学工程硕士学位论文ABSTRACTABSTRACTToday,underadrasticallycompetitivemarketenvironment,Enterpriseshavetomaketheircorporationmorepowerfuliftheywanttoholdmoremarketsegmentshare.Forhavingthecharacteristicofhi
2、ghtechniques,stringentmanufacturingprocess,costlyrawmaterials,shortproductioncycletimeandfastinformationexchange,thesemiconductorindustryisnaturallynotexcludedoutofthislaw.Semiconductormanufacturingisamongthemostcomplexproductionproblemsencounteredtoday.Thus,itisvery
3、importantforsemiconductormanufacturetohaveaMESwhichissuitableforchangingbusiness,scalable,highavailability.However,intermsofspecialindustryfeatherofsemiconductor,howtochooseandbetterintegrateMESsystemtoenhancecompanycompetenceismoreandmoretakenintoenterpriseconsidera
4、tion.Inthispaper,wefirstlyanalysisthehistoryanddevelopingstatusofMEStechnologyandprovidetheMESconceptionandfunctionalmodel.Afterthatwehaveanoverviewofsemiconductorindustrybackground,semiconductortechnologyanddevelopmenttrend.WepointoutthatnooneMEScanadapttoallmanufac
5、turingindustrybecauseeveryfieldhasitsownprocesscharacter.ItissignificantforsemiconductormanufacturertoimplementMESintheircompany.ThediscussionofsemiconductorMES’ssystemarchitecture,functionrealization,implementationprocedureandapplicationfruitistheemphasesofthisartic
6、le.Byanalyzingtheproblemsourcompanywasfacingbefore,andtranslatingtheshopfloorrequirementsintoMEScustomizationusagebasedonthesupplier’sMESplatform,weshowthewaysandmeansofenterprisestoimportMES,andthegreatachivementsafterMESisappliedsincesemiconductormanufacturingisins
7、uchagooddevelopingenvironmentatourmotherland.Thestudyandmostcreativemeaninggoasfollows:1.ThestudydiscussesthedevelopingcourseandfuncationalmodelsofMESinmanufacturingindustryandanalyzestheapplicationstatusandfuncationcomponentsofMESappliedinsemiconductorfabrication.By
8、makinguseoftheMESexperiencesinourcompany,welistoutthenewrequirementstobesettledinsemiconductorfield.2.Thepaperillustratesthekeydeve
