半导体硅片企业MES系统研究与应用.pdf

《半导体硅片企业MES系统研究与应用.pdf》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、半导体硅片企业MES系统研究与应用通过对半导体企业进行实施MES系统，可以完善企业对于设备、质量、生产流程的监控，并逐步形成整套的追溯工具和平台，便于企业进行各种信息的追溯，包括处理方法、处理结果、生产车间、操作人员、工序以及产生时间等。实施具有半导体企业特点的MES系统，不但能够对于企业人员进行促进和鞭策，而且可以提高企业的生产效益。同时，随着本MES系统在半导体企业的实施和应用，对于其他企业的研究与应用有一定的借鉴意义。关键词：半导体硅片，制造执行系统，生产控制，流程管理II半导体硅片企业MES系统研究与应用THERESEARCHANDAPPLICATIONOF

2、SEMICONDUCTORWAFERMESSYSTEMABSTRACTWiththedevelopmentofthedomesticeconomyandtheglobalizationofworldeconomy,thesemiconductorwafercompaniesarefacingagrowingcompetition.Semiconductorwafercompanieshavetokeepimprovingtheirmanufacturecapabilityandadaptation,tomeetcustomers’changingdemandssot

3、hattheycansurviveinthefiercecompetition.Therefore,thesemiconductorwafercompaniesneedtoestablishacompletesolutionforMES(ManufactureExecuteSystem),whichwillbehelpfultothegrowthofbusiness,andimprovestheinformationcommunicationandcompany’sadaption.ItcouldbesaidthatMESsystemhasbeenmoreandmo

4、reattractivetomanufacturingcompanies,semiconductorsiliconcompaniesneedtoestablishaMESsystemswhichfitsfortheirownsituation.Theresearchofthispaperisbasedonthecurrentstatusofsemiconductorwafersmanufacture.ThegoalistoestablishaMESforsemiconductorwafercompanies.Thispaperanalyzesthenecessary

5、andspecificityforsemiconductorwafercompanies’MES,establishedaspecificdirectionandscopeoftheresearch.Thedesignandimplementationofsysteminvolvedtheadvancedobject-orienteddesign,J2EEtechnology,andModelLanguage,etc.Themainresearchofthispaperincludesthefollowingasbelow:(1)Analyzesemiconduct

6、orwafercompany’smanufactureworkflowandspecialization;determinetheshortcomingsanddeficienciesofthecurrentMES;(2)Bymodellanguagetechnology,analyzedandestablishedthebusinessmodelforIII半导体硅片企业MES系统研究与应用semiconductorcompaniesandMES,determinethesystem'soperationalenvironment;(3)Designsemicon

7、ductorMES’sfunction,systemstructure,andnetwork,usingdrill-downapproachtodetaildesignthemainfunctionmodulesofMESsystem,buildrelateddatamodel;(4)IntroducetheJBPMworkflowtechnologytoMES’sproductionsystemtoachievetheintelligentandautomaticmanagementonmanufacturemanagement,qualitymanageme