铁电_氧化物异质结的集成及器件研究

《铁电_氧化物异质结的集成及器件研究》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、河北大学硕士学位论文铁电/氧化物异质结的集成及器件研究姓名：付跃举申请学位级别：硕士专业：光学指导教师：傅广生;刘保亭20090601摘要二极管的整流功能。同时还引入了电．磁、电．光等耦合效应，这些新的特性的产生是和引入的氧化物材料本身的特性分不开的。关键词铁电体异质结电子型超导体巨磁阻p-n结IIAbstract皇曼!詈曼詈!I—III毫曼AbstractLao．5Sro．5C003(LSCO)filmshavebeendepostiedonSrTi03(100)substratesatvariousdep

2、ositontemperature，themicrostructuralandtransportpropertieshavebeeninvestigated．PhiScanstudiesindicatethatLSCOfilmgrownat650oCisepitaxial．ElectricalresistivityofLSCOfilmisstudiedusingfour-probemethod，itisfoundthattheresistivityofLSCOfilmdecreaseswithgrowthte

3、mperaturemonotonically,directlyreflectingthemicrostructureofLSCOfilm．Lao．5Sr0．sC003／PbZr0．s3Tio．4703／La0．5Sr0．5C003(LSCO／PZT／LSCO)heterojunctionisfurtherfabricatedusingSol—Gelandmagnetronsputteringmethod．X-raydiffractioninvestigationindicatesthatbetterprefe

4、rentialorientationofPZTfilmCanbeobtainedforbottonLSCOlayerwithhighergrowthtemperature．AtomicforcemicroscopemeasurementindicatesthattheroughnessofPZTfilmdecreaseswithincreaseoftheLSCOgrowthtemperature．Lao．sSro．5C003／PbZro．53Ti0．4703／Lao．5Sro．5C003ferroelectf

5、iccapacitorhasbeenfabricatedonSrTi03(100)substrate，ferroelectrictesterstudyindicatesthatgrowthtemperatureofbottomLSCOlayerimpactstheferroelectricproperties，leakagecurrentdensityofPZTfilm．WiththeincreaseofLSCOgrowthtemperature，preferentialorientationofPZTfil

6、mbecomeshigher,increasingthematchingofPZTandLSCO，furtherimprovingtheinterfaceofPZTandLSCO，andfilmmicrostructure．Lal．s9Ceo．11Cu04(LCCO)powdertargetispreparedbysolidstatereaction，andn-typesupercondutingLCCOfilmsarepreparedbybothmagnetronsputteringandpulsedlas

7、erdepositonmethods．Rockingcurveof(004)LCCOfilmindicatesthatLCCOfilmwithverygoodcrystalinityishighlyCaxisoriented．ItisfoundthatmagnetronsputteringmethodCanyieldhigherTc0ofLCCOfilmcomparedwithpulsedlaserdeposition．However,pulsedlaserdepositionmethodCanenableb

8、ettersurfaceflatnessofLCCOfilmthanmagnetronsputtering,sincealowerlaserenergyisusedinourexperiments，whichisfIaVorablefordevicefabrication．Highquality(001)orientedLao．6781"0．33MN03(LSMO)filmisdepositedon