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1、SimulationofDChollowcathodedischargeModule：TTBEQ(forfluidmodel)PHM(hybridmodel,fluidmodel)Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.52ComputationalmodelandconditionsUnit：mmDGas:ArCase-1Case-2W・H,D,W:30,10,24.5,1.6,0.5・Pressure1331)1330[Pa]2)6650・Cathode1)-
2、230-300voltage[V]2)-280H・γ+0.050.04・PHMHybridmodelFluidmodelCathodeCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.53HybridmodelFluidmodelUnit:[mm]Anode（GND）Ar:1330[Pa]Anode（GND）Ar:133[Pa]6650[Pa]20.5CathodeCathode32-230[V]5-300[V]-280[V]γ=0.04γ=0.05++50.8Copyri
3、ght2002-2011PEGASUSSoftwareInc.,Allrightsreserved.54Ar:133[Pa]Vc=-230[V]Vc=-280[V]ElectronElectrondensity[/m3]density[/m3]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.55Ar:133[Pa]Vc=-230[V]Vc=-280[V]Ar+Ar+density[/m3]density[/m3]Copyright2002-2011PEGASUSSoftw
4、areInc.,Allrightsreserved.56Ar:133[Pa]Vc=-230[V]Vc=-280[V]ElectricElectricpotential[V]potential[V]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.57Ar:133[Pa]Vc=-230[V]Vc=-280[V]ElectronElectronTemp.[eV]Temp.[eV]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsres
5、erved.58Ar:133[Pa]Vc=-230[V]Vc=-280[V]Ar+Ar+sourcerate[/m3/s]sourcerate[/m3/s]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.59Ar:133[Pa]Vc=-230[V]Vc=-280[V]ReducedelectricfieldReducedelectricfield換算電界[Td][Td][Td]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsr
6、eserved.60Ar:133[Pa]Vc=-230[V]Vc=-280[V]Ar+Ar+Temp.[eV]Temp.[eV]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.61Ar:133[Pa]09.5[mA]2.8[mA]0.03Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.62Ar:133[Pa]-230[V]Mid.-230[V]Bottom-280[V]Mid.-280[V]Bottomyie
7、ld=0.406×Mid.yield=0.086yield=0.011×BottomCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.63Ar:1330[Pa]Ar:6650[Pa]ElectronElectrondensity[/m3]density[/m3]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.64Ar:1330[Pa]Ar:6650[Pa]Ar+Ar+density[/m3]density[/m
8、3]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.65Ar:1330[Pa]Ar:6650[Pa]ElectronElectronTemp.[eV]Tem
