Micro plasma discharge.pdf

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1、SimulationofMicroplasmadischarge(RFelectrode,DCelectrode)Module：TTBEQPHM(fluidmodel)Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.79Computationalmodel(RFelectrode)Insulatorεr=8Gasspecies:ArRPressure:200[Torr]FE320μmleRFelectrode:ctr80μmVpp=400[V]odfreq.=10[MHz]e320μmPhase180°γ=0.04+40μm60

2、0μmCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.80Electrondensity（each1/8period）1/82/83/84/8[/m3]5/86/87/88/8Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.81Sourcerateofexcitedatom（each1/8period）1/82/83/84/8[/m3/s]5/86/87/88/8Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreser

3、ved.82Electrontemperature（each1/8period）1/82/83/84/8[eV]5/86/87/88/8Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.83Plasmapotential（each1/8period）1/82/83/84/8[V]5/86/87/88/8Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.84Computationalmodel(DCelectrode)Gas:He50μmPressure:500[Torr

4、]400μm400μmγ=0.3550μm+εr=3.8600[V]0[V]250μmεr=10.080μm1050μm300[V]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.85Densityprofile10[ns]20[ns]30[ns]1000[ns]e(-)density[/m3]He(+)density[/m3]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.86Electricpotentialandelectrontemp.10[ns]20[ns

5、]30[ns]1000[ns]potential[V]e(-)temp.[eV]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.87Ionizationrate10[ns]20[ns]30[ns]1000[ns]Copyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.88Timehistory(0～50[ns])Monitorcellindexe(-)densityHe(+)densityCopyright2002-2011PEGASUSSoftwareInc.,Allri

6、ghtsreserved.89Timehistory(0～1000[ns])e(-)densityHe(+)densityCopyright2002-2011PEGASUSSoftwareInc.,Allrightsreserved.90