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1、SensorsandActuatorsA58(1997)113±119Optimizationandperformanceofhigh-resolutionmicro-optomechanicalthermalsensorsUJ.Lai,T.Perazzo,Z.Shi,A.MajumdarDepartmentofMechanicalandEnvironmentalEngineering,UniversityofCalifornia,SantaBarbara,CA93106,USAReceived19June
2、1996;revised5November1996;accepted7November1996AbstractTheabilitytodetectopticallythede¯ectionsofmicrofabricatedbi-materialcantileverbeamswith3pmresolutionhasallowedthemeasurementoftemperature,opticalpower,andenergywith2mK,76pW,and15fJresolution,respective
3、ly.Thethicknessratioofthetwobeammaterialsisoptimizedtoproduce40%improvementoverpreviousdesigns.Thegoverningequationsforthesensorperformancehavebeendevelopedandformthebasisfordesigningbettercantilevershapeforfurtherperformanceimprovements.Effortsareunderway
4、todetectcantileverde¯ectionswith100fmresolution,sothatthethermalperformancecanbeimprovedbyanorderofmagnitude.Suchunprecedentedlyhighresolutionsareopeninguppromisingprospectsfortheiruseininfrareddetectionandinstudyingmolecular-leveladsorptionandsurfacechemi
5、calreactions.Keywords:Bi-materialmicrocantilevers;Designoptimization;Thermalsensors1.IntroductionMicrofabricatedcantileverbeamshavebeenusedinmicroelectromechanicalsystems(MEMS)foravarietyofsensorandactuatorapplications.Inthispaper,wepresentasimplemethodofm
6、easuringtemperaturechange,DT,usingy6amicrocantileverbeamwitharesolutionofabout10K(1mK).Thethermalmassofthesensorissuf®cientlylowthaty14theenergyresolutionisintherange10J(10fJ),andthey11powerresolutionisontheorderof5=10W(50pW).Theseresolutionsareseveralorde
7、rsofmagnitudehigherthanthoseofconventionalthermalsensorssuchasthermocouples,semiconductordiodes,aswellasresistanceandinfraredther-mometers.Itisenvisionedthatsuchbreakthroughsinreso-lutionarelikelytoopennewapplicationswhereothertechniqueswereunabletoprobe.E
8、xamplesoftheseincludemolecular-leveladsorption,desorptionandsurfacechemicalFig.1.Schematicdiagramofabi-materialcantileverbeam.Atemperaturereactions,nucleationofadsorbates,aswellashigh-resolutionchangeinducesc
