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1、AbstractAbstractInrecentyears,theemergingdigitalmicrofluidictechnologyhasshownhugedevelopmentpotentialandapplicationprospectinchemistry,biology,medicineandotherareasbecauseofitsadvantageofsimplestructure,savingthesample,easeofintegration,widemanipulaterangeandsoon.Thisdissertationha
2、spreliminarilydiscussedthedigitalmicrofluidictechnologythroughthemethodoftheoreticalanalysis,simulationoptimizationandexperimentalverification.Firstly,thedissertationanalyzedtheadvantagesanddisadvantagesofvariouscontrolmethodofdigitalmicrofluidicsystem,andthen,determinedtoutilizethe
3、theoryofelectrowettingondielectric(EWOD)torealizethemicrodroplet’sdriven.Afterwards,thedissertationintroducedtheprincipleofEWOD,establisheditsmathematicalmodelandsimulatedtheprocessofEWOD.Furthermore,thedissertationexpoundedhowtoimplementthemicrodroplet’sdrivenusingthetheoryofEWODin
4、detail.Secondly,thedissertationdevelopedamathematicmodelofthedigitalmicrofluidicsystem,simulatedthestaticanddynamicperformanceofthesystemwiththeuseofCOMSOLMultiphysics4.4,obtainedtheelectricpotentialdistributionofthesystem,analyzedtheinfluenceoftheparameterssuchasthethicknessofdiele
5、ctriclayertothedigitalmicrofluidicchip,andthenprovedthatthesingleplatestructurewaseasiertodrivethedroletthanthedoubleplatesructure.Aferwards,thedissertationsimulatedthemicrodroplet’smovementprocessonthepremiseofthedeterminedstructureandparameters.Thusitprovidedareliableguidefortheop
6、timizationofthechip.Finally,accordingtothesystemstructureandparametersdeterminedbyoursimulations,weproducedadigitalmicrofluidicchip,usingthemethodofwetetchingprocesstomaketheITOdriveelectrode,usingthemethodofRFmagnetronsputteringtodepositetheSiO2dielectriclayer,andusingCH3(CF2)7(CH2
7、)2Si(OC2H5)3toproducethehydrophobiclayer.Wealsodiscussedthekeytechnologyandinfluencefactorsinthechipproductionprocess.Then,wedesignedandweldedcontrolcircuitofthedigitalmicrofluidicsystem,andalsoverifieditsfunction.Afterthat,wesetupatestplatformfordigitalmicrofluidicsystemandrealized
8、thetransportofmicro
