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1、AbstractAbstractInrecentyears,theemergingdigitalmicrofluidictechnologyhasshownhugedevelopmentpotentialandapplicationprospectinchemistry,biology,medicineandotherareasbecauseofitsadvantageofsimplestructure,savingthesample,easeofintegration,widemanipulaterangeandsoon.Thisdisse
2、rtationhaspreliminarilydiscussedthedigitalmicrofluidictechnologythroughthemethodoftheoreticalanalysis,simulationoptimizationandexperimentalverification.Firstly,thedissertationanalyzedtheadvantagesanddisadvantagesofvariouscontrolmethodofdigitalmicrofluidicsystem,andthen,dete
3、rminedtoutilizethetheoryofelectrowettingondielectric(EWOD)torealizethemicrodroplet’sdriven.Afterwards,thedissertationintroducedtheprincipleofEWOD,establisheditsmathematicalmodelandsimulatedtheprocessofEWOD.Furthermore,thedissertationexpoundedhowtoimplementthemicrodroplet’sd
4、rivenusingthetheoryofEWODindetail.Secondly,thedissertationdevelopedamathematicmodelofthedigitalmicrofluidicsystem,simulatedthestaticanddynamicperformanceofthesystemwiththeuseofCOMSOLMultiphysics4.4,obtainedtheelectricpotentialdistributionofthesystem,analyzedtheinfluenceofth
5、eparameterssuchasthethicknessofdielectriclayertothedigitalmicrofluidicchip,andthenprovedthatthesingleplatestructurewaseasiertodrivethedroletthanthedoubleplatesructure.Aferwards,thedissertationsimulatedthemicrodroplet’smovementprocessonthepremiseofthedeterminedstructureandpa
6、rameters.Thusitprovidedareliableguidefortheoptimizationofthechip.Finally,accordingtothesystemstructureandparametersdeterminedbyoursimulations,weproducedadigitalmicrofluidicchip,usingthemethodofwetetchingprocesstomaketheITOdriveelectrode,usingthemethodofRFmagnetronsputtering
7、todepositetheSiO2dielectriclayer,andusingCH3(CF2)7(CH2)2Si(OC2H5)3toproducethehydrophobiclayer.Wealsodiscussedthekeytechnologyandinfluencefactorsinthechipproductionprocess.Then,wedesignedandweldedcontrolcircuitofthedigitalmicrofluidicsystem,andalsoverifieditsfunction.Aftert
8、hat,wesetupatestplatformfordigitalmicrofluidicsystemandrealizedthetransportofmicro
