003. Laser Processing of Thin Films and Microstructures - Oxidation, Deposition and Etching of Insulators (1987)

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1、SpringerSenesinMaterialsScience3EditedbyAramMooradianSpringerSenesInMaterialsScienceEditors:AramMooradianMortonB.PanishVolume1ChemicalProcessingwithLasersByD.BauerleVolume2Laser-BeamInteractionswithMaterialsPhysicalPrinciplesandApplicationsByM.vonAllmenVolume3LaserProcessingofThinFilmsandMicrostruct

2、uresOxidation,DepositionandEtchingofInsulatorsByI.W.BoydVolume4MicroclustersEditors:S.Sugano,Y.Nishina,andS.OhnishiIanW.BoydLaserProcessingofThinFilmsandMicrostructuresOxidation,DepositionandEtchingofInsulatorsWith77FiguresSpringer-VerlagBerlinHeidelbergNewYorkLondonParisTokyoDr.IanW.BoydDepartmento

3、fElectronicandElectricalEngineering,UniversityCollegeLondon,TorringtonPlace,LondonWCIE7JE,UKSeriesEditors:Dr.AramMooradianLeaderoftheQuantumElectronicsGroup,MIT,LincolnLaboratory,P.O.Box73,Lexington,MA02173,USADr.MortonB.PanishAT&TBellLaboratories,600MountainAvenue,MurrayHill,NJ07974,USAISBN-13:978-

4、3-642-83138-6e-ISBN-13:978-3-642-83136-2DOl:10.1007/978-3-642-83136-2LibraryofCongressCataloging-in-PublicationData.Boyd,IanW.,1958-Laserprocessingofthinfilmsandmicrostructures;oxidation,deposition,andetchingofinsulators.(Springerseriesinmaterialsscience;3).1.Lasers-Industrialapplications.I.Title.II

5、.Series.TA1677.B691987621.36'687-20660Thisworkissubjecttocopyright.Allrightsarereserved,whetherthewholeorpartofthematerialisconcerned,specificallytherightsoftranslation,reprinting,re-useofillustrations,recitation,broadcasting,reproductiononmicrofilmsorinotherways,andstorageindatabanks.Duplicationoft

6、hispublicationorpartsthereofisonlypermittedundertheprovisionsoftheGermanCopyrightLawofSeptember9,1965,initsversionofJune24,1985,andacopyrightfeemustalwaysbepaid.ViolationsfallundertheprosecutionactoftheGermanCopyrightLaw.©Springer-VerlagBerlinHeidelberg1987Softcoverreprintofthehardcover1stedition198

7、7Theuseofregisterednames,trademarks,etc.inthispublicationdoesnotimply,evenintheabsenceofaspecificstatement,thatsuchnamesareexemptfromtherelevantprotectivelawsandregulationsandthereforefreeforgeneralus