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1、LaserprocessingbyApplicationnotesusingdiffractiveopticaLIssue№AN1012IL01LaserbeamshapingtechniqueauthorsKeywords:Diffractiveoptics,Beamshaper,Laserprocessing,Flat-top.GediminasRAČIUKAITIS1EvaldasSTANKEVIČIUS1Laserbeamshapingandhomogenizationtechniquesaresubstantia
2、ltoPauliusGEČYS1optimizealargenumberoflaser-materialprocessingapplicationsandMindaugasGEDVILAS1laser-materialinteractionstudies.Diffractiveopticalelements(DOE)ChristianBISCHOFF2playimportantroleinprovisionoftheprocess-adaptedlaserbeam2ErwinJÄGERshaping.Inthispaper
3、,wepresentanapproachforlaserbeamshaping2UdoUMHOFERbyusinginnovativeDOE.ThecircularGaussianbeamwastransformedFriedemannVÖLKLEIN3toasquareflat-topintensityprofileinthefocalplaneoftheobjectivelensbyusingnovelDOEfromTOPAGLasertechnikGmbH.About1CenterforPhysicalScience
4、and95%ofthelaserenergywascoupledinthemainbeamwithanearlyTechnology,SavanoriuAv.231,perfectrectangularshape.ExperimentalresultshavebeenachievedbyLT-02300Vilnius,Lithuaniaapplyingtheshapedbeamforlasermicrofabrication.Thepicosecond2TOPAGLasertechnikGmbH,andnanosecond
5、laserswithmoderatebeamquality(M2=1.5)wereNieder-Ramstaedter-Str.247,usedintheexperiment.TheshapedlaserbeamwasappliedfordirectD-64285Darmstadt,Germanylaserablationofmetalfilmontheglasssubstrate,drillinginasilicon3InstitutfürMikrotechnologien,wafer,scribingofthin-fi
6、lmsolarcellsandothertechnicalmaterials.HochschuleRheinMain,Thistechniqueallowscreatingarec-tangular-shapedflat-topintensityAmBrückenweg26,profileinthefocalplanethatshowsdistinctadvantagesinlaserD-65428Rüsselsheimmaterialprocessing.EKSPLAnote:duetothecontinuousprod
7、uctimprovements,lasernameswerechangedrespectively:NL640andNL15100wasrenamedtoBalticseries,PL10100/SHwasrenamedtoAtlanticseries.1.introductionAGaussianbeamisawell-knownandmostconvenientproblemofshapingalaserbeamarosenearlytogetherwithspatiallaserbeamdistribution.It
8、preservesitsdistributioninventionofalaser.Friedenpublishedthefirstpaperonwhenpropagatingandisexcellentinfocusingtoashapingofthelaserbeamtoonewithuniform
