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1、CThC3-P35NewOpticalVibrometerUsingaSelf-MixingLaserDiodeModulatedwithaRampCurrentShigenobuShinohara11NationalUniversityCorporationShizuokaUniversity,Hamamatsu432-8561Japan;M.Shimizu2,M.Niwayama1,N.Yabuzaki1,Y.Lee1,1ShizuokaUniversity,Japan;2RohmCo.,Ltd.,Japantdsshin@
2、ipc.shizuoka.ac.jp,Abstractproduceaself-mixingormode-hopsignal.Newopticalvibrometerusingaself-mixinglaser2.2NormalizedSignalΔPnorandCouplingdiodeisdemonstratedexperimentally.ParameterCPeak-to-peakamplitude20nm-90nmofaThenormalizedsignalΔPnorisgivenbypiezoelectrictran
3、sducer(PZT)vibratingat∆P120kHzwasmeasuredwithaccuracy2%-17%,∆P==cos(ωτ)(1)norsand10%average,whileaccuracybysimulation2∆Pmax2about4%.whereΔPisanincrementoftheopticaloutputpowerofSM-LDduetothereturnedlight,Keywords:Self-Mixing,LaserDiode,RampΔPmaxisaprincipalmaximumoft
4、heamplitudeCurrent,Vibrometer,Mode-hop,CouplingoftheΔPwhenωsτchangesmorethan2πParameterinaccordancewithavibratingdisplacement,ωsisanangularfrequencyoftheSM-LDwith1.Introductionopticalfeedback,andτisaroundtriptimeofIncaseofvibrationamplitudelessthanahalfthereturnedlig
5、ht.CouplingparameterCwavelength,aself-mixing(SM)signalobtainedrelatedtoopticalfeedbackisgivenbyfromaphotodiode(PD)inthelaserpackagebecomesaquasisinusoidalwaveformwithκτ2C=1+α(2)thesamefrequencyasthatofsinusoidallyτinvibratingtarget.Thenweobtainedtheoreticalwhereκisef
6、fectivereflectivityofthetarget,calibrationcurveswhichrelatethevibrationτinisroundtriptimeinthelaserandαisamplitudewithafractionofwavelengthtothenormalizedamplitudeofanSMsignal.1)linewidthenhancementfactor.Inordertomeetrequirementsofchecking2.3CalibrationCurvesforVibr
7、ationAmplitudefailureduringwirebondinginrealtimeLSITherelationbetweenthenormalizedfabricationprocess,weproposedanewcompactvibrometerutilizingthecalibrationcurvesforthepeak-to-peakamplitude∆Pp-p/2ΔPmaxofSMSM-LDwhichismodulatedwithamultiple-stepsignal∆Pnorandthetargetp
8、eak-to-peakcurrent.2)Thevibrometerhadafairaccuracyamplitude∆Lp-pbecomesmonotonously4.5%todetectabnormalvibrationofarealincreasingcu
