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ID:34411463
大小:656.00 KB
页数:25页
时间:2019-03-05
《【socvista】ic设计完全流程》由会员上传分享,免费在线阅读,更多相关内容在教育资源-天天文库。
1、FullyCustomICDesignFlowCircuitschematic(電路圖)ComposerCircuitpre-simulation(模擬)HSPICELayout(佈局)LakerDesignrulecheck(DRC)CalibreLayoutv.s.Schematic(LVS)CalibreParasiticExtraction(PEX)CalibreCircuitpost-simulation(模擬)HSPICEICLabLayout1ICLabICFabricationProcessOverviewWafer:200~
2、300mmindiameterandabout0.35~1.25mmthickProcesssteps:20~30MasksOxidationDiffusionLayoutEtchChipsProcessedwaferChemicalWafersvaporIondepositionChemicalsimplantationFabricationICLabLayout2ICLabICPhotolithographicProcessApplymaterialtowafertobepatternedEtchandapplyspecificpro
3、cessingMaterialstepWaferEtchawayunwantedmaterialSpinonpositivephotoresistPhotoresistMaterialWashoffphotoresistPatternphotoresistwithUVlightPatternedthroughglassmaskmaterialUVlightGlassmaskChromepatternSolublephotoresistICLabLayout3ICLabCMOSP-SubstrateProcessFlowCrosssect
4、ionviewSubstrateWellcontactGGcontactBDSSDBn+Polyp+Polyp+n+n+p+p+n+nwellpsubstrateNMOSprocessstepsActiveregion,polygate,p+/n+implant,metalcontact/linePMOSprocessstepsNwell,activeregion,polygate,p+/n+implant,metalcontact/lineICLabLayout4ICLabProcessFlowv.s.LayoutNwellNWE
5、LLlayer(NW)nnnSiOSiO22nwellpsubstrateActiveregionDIFFlayer(OD)WellContactPMOSRegionSiOSiO22nwellpsubstrateICLabLayout5ICLabProcessFlowv.s.LayoutPolygate(self-alignedgate)POLY1layer(PO)SiOPolySiO22nwellpsubstrateSiOPolySiO22nwellpsubstrateICLabLayout6ICLabProcessFlowv.s.L
6、ayoutP+/N+implantPIMPlayer(PP)pppSiOp+PolySiO22p+p+nwellpsubstratenSiOp+PolySiO22p+p+n+NIMPlayer(NP)nwellpsubstrateSilicide(Reduceresistance)SiOp+PolySiO22p+p+n+nwellPolycide:silicideonpolypsubstrateSalicide:self-alignedsilicideondrain/sourceICLabLayout7ICLabProcessFlowv.
7、s.LayoutMetalcontacts/linesCONTlayer(CO)ContactwidowsSiO2p+PolySiO2p+p+n+nwellpsubstrateMetal:AlorCuMETAL1layer(M1)WellDGSContactSiO2P+PolySiO2P+P+N+NwellPsubstrateICLabLayout8ICLabProcessFlowv.s.LayoutMetalvias/linesVIA12layer(VIA1)ViawidowsSiO2P+PolySiO2P+P+N+NwellPsu
8、bstrateMETAL2layer(M2)SiO2P+PolySiO2P+P+N+NwellPsubstrateICLabLayout9ICLab
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