二维宏微驱动平台及其去耦合技术-研究

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1、AbstractWiththedevelopmentofmodemtechnologyandindustry,recentyearshavewitnessedimperiousdemandsonmotionstagewithlongrangeandhighpositioningaccuracyinthefieldsofBio-mechanical，MilitaryEngineering，PrecisionOpticalEngineeringandPrecisionMechanicalEngineering．Macro／microdualdrivetechnologyisaneffe

2、ctivestrategyinrealizinglongrangaswellashighprecisionpositioning．Withthecombinationofmacroandmicrodrive，thesvstemcanachievehighprecisionpositioningunderpremiseoflongrangemotion·ThuscarryingoutresearchOffkeytechnologyinthefieldhasagreatandfar-reachingsignificance·Basedontheabove．mentionedbackgr

3、oundandsignificance，thisthesisbuildsa2-Dmacro／microdualdrivelong．ranghighprecisionpositioningstage：thelinermotorfulfilslongrangemotion．highprecisiongratingrulermeasuresitsrealdisplacement，andflexure．hmgebasedmicropositioningstagewillcompensatethiserror,toimprovepositioningpreclslon‘1nthefirstc

4、hapter,thebackgroundandsignificanceofmacro／microdualdrivetechnologywasintroduced．Then。theresearchstatusofdecouplingmicropositioningstagesandthedecouplingstrategybetweenmacroandmicrostagesarestated·1nthesecondchapter,overalldesignschemeofmicrostagewasproposed，andparamete‘calculation，simulationa

5、ndanalysisofthesystem’Sstiffness，frequency,displacementamplincation，andcouplingdegreewereconducted．A2-Dmicropositioningstagewithiargedisplacementamplificationandlowcouplingdegreewasdesignedandmachinedthroughwire．．electrodecuttingmethod．1nthethirdchapter,themicrodrivepositioningstagesystemwasbu

6、iltanditsopen。loopperfonnancewastestedandanalyzed．Thentheoreticalmodelwasestablishedthroughsystemidentification，andinitialPIDcontrollerwasdesigned．Closed—loopPIDcontrolexperimentwasconductedanditsiinearity,resolutionandcouplingdegreeweremeasured·1nthefourthchapter,positioningperformanceofliner

7、motorstagewasassessedandmultipointpositioningcontrolflowwasproposedwiththeconsiderationofmicrostage’smotionrange．ThemuItipointpositioninganddecouplingexperimentsofmacro／microdualdrivestagewereconducted，anditconfirmsthatwiththeadoptionof