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1、西北工业大学工学硕士学位论文AbstractOxidationresistanceofC/SiCcompositeswithamulti-SiCcoating(SiC-C/SiC)shouldbeimprovedtomeetthedemandofhighperformanceaeroenginesupto16500Cforalongtime.CoatingcracksanddefectsaremainreasonsforthelimitedoxidationresistanceofSiC-C/SiC.Inthisthesis,surfacem
2、odificationofSiCcoatingwascarriedoutwithPhysicalVaporDeposition(PVD)andIonImplantation&Deposition.usingAl,BandSi.EfectsofthemodifiedcoatingsontheoxidationresistanceofSiC-C/SiCwerestudiedwithSEM,XRDandAESandsoon.Themaincontentsandresultsareasfollows:(1)Coatingcracks.wereseal
3、edornarrowedbyvacuumevaporatinganAlfilmof3um.WightlossesofSiC-C/SiCinsimulatedairat5000C,6000Cand700'Cwereallremarkablyreduced,butthevalueswerestilllarge.(2)CoatingcracksanddefectswerepartlysealedbymagnetronsputeringaSifilmof3um,andweightlossofSiC-C/SiCinsimulatedairat13000
4、Cwasreduced.(3)SiCbecameamorphousasaresultofMetalVaporVacuumArc(MEVVA)sourceAlimplantation.ElectronCyclotronResonance(ECR)sourceB(1017ions/cm2)implantationorSi(1016ions/cm2)implantationhadthesameresults.Cracksstillexistedanddefectschangedlitle.OxidationresistanceofSiC-C/SiC
5、insimulatedairhadbeenimprovedat13000Cbutnotat7000CwithAlimplantation,andimprovedat12000Caswellas13000CwithBimplantation.Noremarkablechangewasfoundat13000CwithSiimplantation(4)AnnealofSiC-C/SiCwithSiimplantationinvacuumat1600'Cfor30minhadresultedinproductionofnewcracks,which
6、ledtolargerweightlossofthecomposite.(5)GlassyoxidefilmofsamplesprocessedbyMEVVAAUPIIDSicoveredthesurfaceofSiCcoatingthicklyanduniformly,andleftfewholesasaresultofagoodabilityofsealing,whichmadeweightlossofSiC-C/SiCsmallerinairat13000CKeyWords:C/SiCComposite,SiCCoating,Oxida
7、tionResistance,SurfaceModification,VacuumEvaporation,MagnetronSputtering,IonImplantationandDeposition西北工业大学工学硕士学位论文第一章绪论1.1C/Sic复合材料连续碳纤维增韧碳化硅陶瓷复合材料(C/Sic)具有耐高温、低密度、高比强、高比模、抗氧化和抗烧蚀等优异性能，具有类似金属的断裂行为、对裂纹不敏感、没有灾难性损毁，被普遍认为是高性能发动机用高温结构材料之一，应用范围可覆盖瞬时寿命(数十秒一数百秒)、有限寿命(数十分钟一数十小时)和长寿
8、命(数百小时一上千小时)，对应温度区间分别为:2800`C一30000C.2000℃一2200℃和1650'C['一]。C/Sic复合材料主要应用于发动机的燃烧室、
