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1、SpringerSeriesinMaterialsSeience1EditedbyHans-JoachimQueisserSpringerSeriesInMaterialsScienceEditors:AaramMooradianMortonB.PanishVolume1ChemicalProcessingwithLasersByD.BäuerleVolume2Laser-BeamInteractionswithMaterialsPhysicalPrinciplesandApplicationsByM.vonAHmenVolume3LaserP
2、rocessingofThinFilmsandMicrostrnctnresOxidation,DepositionandEtchingofInsulatorsBy1.W.BoydDieterBäuerleChemicalProcessingwithLasersWith88FiguresSpringer-VerlagBerlinHeidelbergGmbHProfessorDr.DieterBäuerleAngewandtePhysik,Johannes-Kepler-UniversitätLinz,A-4040Linz,AustriaGues
3、tEditor:ProfessorDr.Hans-JoachimQueisserMax-Planck-InstitutfürFestkörperforschung,Heisenbergstraße1,D-7000Stuttgart80,Fed.Rep.ofGerrnanySeriesEditors:Dr.AaramMooradianLeaderoftheQuantumElectronicsGroup,MIT,LincolnLaboratory,P.O.Box73,Lexington,MA02173,USADr.MortonB.PanishAT&
4、TBellLaboratories,600MountainAvenue,MurrayHill,NJ07974,USAISBN978-3-662-02507-9ISBN978-3-662-02505-5(eBook)DOI10.1007/978-3-662-02505-5LibraryofCongressCataloging-in-PublicationData.Bäuerle,D.(Dieter),1940-.Chemicalprocessingwithlasers.(Springerseriesinmaterialsscience;v.1).
5、Bibliography:p.Inc1udesindex.1.Lasers-Industrialapplications.2.Materials-Effectofradiation.I.Title.11.Series.TA1677.B381986621.36'686-26203Thisworkissubjecttocopyright.Allrightsarereserved,whetherthewholeorpartofthematerialisconcerned,specificallythoseoftranslation,reprintin
6、g,reuseofillustrations,broadcasting,reproductionbyphotocopyingmachineorsimilarmeans,andstorageindatabanks.Under§54oftheGermanCopyrightLaw,wherecopiesaremadeforotherthanprivateuse,afeeispayableto"VerwertungsgesellschaftWort",Munich.©Springer-VerlagBerlinHeidelberg1986Original
7、lypublishedbySpringer-VerlagBerlinHeidelbergNewYorkin1986Softcoverreprintofthehardcover1stedition1986Theuseofregisterednames,trademarks,etc.inthispublicationdoesnotimply,evenintheabsenceofaspecificstatement,thatsuchnamesareexemptfromtherelevantprotectivelawsandregulationsand
8、thereforefreeforgeneraluse.Offsetprinting:DruckhausBeltz,6944Hemsbach/Bergs
