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《The Search of Earthquake Early Warning and Vibration Picking Device Based on MEMS》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。
1、研究生课程考核试卷科目：专业外语教师：姓名：学号：20140802054专业：微电子学与固体电子学类别：学术上课时间:2014年10月至2014年12月考生成绩：卷面成绩平时成绩课程综合成绩阅卷评语：阅卷教师(签名)TheSearchofEarthquakeEarlyWarningandVibrationPickingDeviceBasedonMEMSLaibaoYu,ZhigaoChen,XiongweiWu,HanLv(KeyLaboratoryofEarthquakeGeodesy,InstituteofSeismology,CEA,Wuhan430071)(
2、WuhanBaseofInstituteofCrustalDynamics,CEA,Wuhan430071)Abstract:AsetofearthquakeearlywarningandvibrationpickingdevicebasedontheMEMStechnologywasdesigned.ThedevicewastestedbyusingGSK-166vibrationtableandcomparedwithstandardsensorAC43throughthemetrologicalverification,andthe resultsshowed
3、thattheperformanceparametersofthedevice meettherequirementsofearthquakeearlywarningsystembasically.KeyWords:MEMStechnology,earthquakeearlywarning,vibrationpickingdevice1IntroductionPhysicsoftheearthisasciencebasedonobservationandmeasurement,seismologyhasarapiddevelopmentsincetheinstrum
4、enthaveemergedandthemethodbasedontheinstrumentobservationwasestablished.Afterthedevelopmentofseveralgenerations,seismometerhavedevelopedfromtherecordbymagnifyingsmokeusinginitialmechanicallevertomeasurementIntegratedelectronictechnologyandcomputertechnology,improvedthefrequencybandrang
5、eanddetectingprecisionsubstantially,anditmaketheseismologicalresearchanddevelopmententeranewstage.Withtheresearchanddevelopmenttoseismologyscienceandrequirementofspacedetectiontothemoonandthemars,combiningwithdevelopmentofthemodernelectronicandcomputertechnology,modernseismicsensorsnee
6、dtodeveloptowardslowpowerconsumption,miniaturization,chip,lowcostandhighreliability,andbeabletogetfullbandobservationandmeasurement.Modernmeasurementinstrumentbasedonmechanicalhammerhavesomeadvantagessuchashighlowresolution,largedynamicrange,butshowthedeficienciesintheapplication.Micro
7、ElectronicMechanicalSystemisbasedontheintegratedcircuittechnologyandmicromechanicalprocess,andthenintegratethemechanicalcomponents,opticalsystem,drivercomponents,electroniccontrolsystemasawholeunit,hassmallvolume,lightweight,smallconsumption,lowcost,easytointegrateandstrongoverloadca
