引入纳米多孔制备低介电聚合物薄膜

《引入纳米多孔制备低介电聚合物薄膜》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、摘要通过热引发甲基丙烯酸环戊基．立方低聚倍半硅氧烷(R7R’Si8012’POSS)(MA—POSS)与臭氧预处理的含氟聚酰弧胺(6F—Durene)自由基接枝共聚制得6F．Durene共价接枝包含立方低聚倍半硅氧烷(POSS)的聚甲基丙烯酸酯(PMA)支链的纳米复合物。用核磁共振(NMR)、X．射线衍射(Ⅺ①)和场发射扫描电子显微镜(FEsEM)等分别对POSS／6F．nLirene纳米复合物进行了结构表征及形貌观察。POSS／6F．Durene纳米复合物薄膜与未接枝的6F．Durene薄膜相比具有更低的介电常数，其介电常数(￡)在2．5．2．0范围

2、。研究了臭氧预处理的SiLK西热引发甲基丙烯酸甲基醚聚(乙二醇)酯(PEGMA)自由基接枝聚合。用核磁共振仪(NMR)和X．射线光电子能谱(XPS)表征接枝后共聚物的化学组成和结构。然后将接枝聚合物在硅Si(100)底板上溶液旋模法制备低介电常数(K)的纳米多孔SiLK膜。紧接着，热引发SiLK环加成和交联，并且使不稳定的PEGMA侧链降解，得到具有很好SiLK主链和孔径10．15nm孔洞的纳米多孔SiLK膜。折射率从无孔SiLK介电薄膜的1．62降至1．47。含有15．2wt％PEGMA侧链的SiLK接枝共聚物热分解后其介电常数约为2．2。关键词：接

3、枝共聚；介电常数；聚酰亚胺；低聚倍半硅氧烷AbstractNanocompositesof6F·Durene、Ⅳittlcovalentlygraftedpolymethacrylate(PMA)sidechainscontainingpolyhedraloligomericsilsesquioxane限7R’Si$012orPOSS)unitswerepreparedbythermally-initiatedfree-radicalgraftpolymerizationofmethacrylcyclopentyl-POSS(MA-POSS)witll

4、theozone-pretreated6F-Durene．Thechemicalcompositionandstructureofthe6F—Durenewithgraftedmethacrylcyclopentyl-POSSsidechains(POSS／6F·Durenecopolymcrs)werecharacterizedbynuclearmagneticresonance(NMR)，X-raydiffraction(XRD)，andfield-emissionscanningelectronmicroscopy(FESEM)．ThePOSS／

5、6F—Durenenanocompositefilmshadbothlowerandtunabledielectricconstants，incomparison、^，itllthatofthepristine6F-Durenefilms．Dielectricconstants(e’s)ofabout2．5to2．0wereobtained．Thermally-initiatedfree-radicalgraftpolymerizationofpoly(ethyleneglyc01)methylethermethacrylate(PEGMA)witht

6、heozone-pretreatedSILK*precursorWaScarriedout．Thechemicalcompositionandstructureofthegraftcopolymerswerecharacterizedbynuclearmagneticresonance(NMR)andX-rayphotoelectronspectroscopy0a's)．Nanoporouslowdielectricconstant(曲SiLKfilmswerepreparedbysolutionspin-castingofthe鲫ftcopolymc

7、rs011theSi(100)substrates，followedbythermally—inducedcycloadditionandcross-linkingoftheSiLKprecursorandthermaldecompositionofthelabilePEGMAsidecIlains．ThenanoporousSiLKfilmsso·-obtainedhadwell·-preservedSiLKbackbonesandporesizeintherangeof10一15Sln．Therefractiveindex(砒)ofresultin

8、gfilmshasdecreasedto1．47，from1．62forthepristine