锗的添加对磁控溅射技术制备的氮化钛薄膜的形态和性能的影响

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1、锗的添加对磁控溅射技术制备的氮化钛薄膜的形态和性能的影响Abstract:ThinfilmsofTM–X–N(TMstandsforearlytransitionmetalandX=Si,Al,etc.)areusedasprotectivecoatings.ThemostinvestigatedamongtheternarycompositesystemsisTi–Si–N.ThesystemTi–Ge–Nhasbeenchosentoextendtheknowledgeabouttheformationofnanocompositefilms.Ti–Ge–Nthinfilmswer

2、edepositedbyreactivemagnetronsputteringonSiandWC–CosubstratesatTs=240-C,fromconfocalTiandGetargetsinmixedAr/N2atmosphere.ThenitrogenpartialpressureandthepowerontheTitargetwerekeptconstant,whilethepowerontheGetargetwasvariedinordertoobtainvariousGeconcentrationsinthefilms.NopresenceofGe–Nbondswas

3、detected,whileXrayphotoelectronspectroscopymeasurementsrevealedthepresenceofTi–Gebonds.TransmissionElectronMicroscopyinvestigationshaveshownimportantchangesinducedbyGeadditioninthemorphologyandstructureofTi–Ge–Nfilms.ElectronEnergy-LossSpectrometrystudyrevealedasignificantincreaseofGecontentatth

4、egrainboundaries.ThesegregationofGeatomstotheTiNcrystallitesurfaceappearstoberesponsibleforlimitationofcrystalgrowthandformationofaTiGeyamorphousphase摘要：TM-X-N的薄膜（TM代表前过渡金属，X=硅，铝等）被用作保护涂层。三元复合体系中研究最多的为Ti-SI-N的系统钛锗-N的已被选定为延续约纳米复合膜的形成的知识。钛锗-N的薄膜，通过在Si和WC-Co硬质合金反应磁控溅射沉积基板ATTS=240-C，从混合Ar/N2atmosphe

5、re共聚焦钛和锗的目标。的氮分压和在Ti靶的功率保持恒定，同时对Ge靶的功率是变化的，以便获得各种的Ge浓度的膜。检测N键，而X射线光电子能谱测量揭示的Ti-Ge键的存在-葛没有出现。透射电子显微镜的调查已经表明，在钛锗的形态和结构由葛除了引起重要的变化-N薄膜。电子能量损失光谱法研究发现Ge含量在晶界显著增加。Ge原子的氮化钛晶粒表面的偏析似乎是负责晶体生长一个总IgEÝ非晶相的形成和限制。1、IntroductionDuetotheirmechanicalproperties,highmeltingpointandhighchemicalandthermodynamicstabil

6、ity,transitionmetalnitridesareattractivematerialsforvarioustechnologicalapplicationssuchasprotectivecoatinginindustry,diffusionbarrierortunneljunctionsinmicroelectronics,andhardcoatinginmachiningtools.Theimprovementofaparticularfilmproperty(e.g.hardness,chemicalinertness)canbeachievedbyadditiono

7、fathirdelement(e.g.Al,B,Cr,Si)toabinarynitride(e.g.TiN,ZrN,NbN,CrN)forobtainingaternarycompound[1–10].Eveninsmallquantitythisthirdelementplaysadecisiveroleinthemodificationofchemicalbonding,structureandmorphology.由于它们的机械性能，高