资源描述：
《非平衡磁控溅射技术制备用于红外减反射的无氢碳膜_英文》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。
1、------------------------------------------------------------------------------------------------非平衡磁控溅射技术制备用于红外减反射的无氢碳膜_英文_第25卷第6期Vol125No16ArticleID:167322812(2007)0620850204材料科学与工程学报JournalofMaterialsScience&Engineering总第110期Dec.2007Hydrogen2freeCarbonFilmsbyUnbala
2、ncedMagnetronSputteringforInfraredAnti2reflectionCoatingsXUJun2qi,FANHui2qing,LIUWei2guo,HANGLing2xia1,2122(1.StateKeyLaboratoryofSolidificationProcessing,SchoolofMaterialsScienceandEngineering,NorthwesternPolytechnicalUniversity,Xi.an710072,China;2.SchoolofOpto2electron
3、icEngineering,Xi.anTechnologicalUniversity,Xi.an710032,China)=Abstract>Thehydrogen2freediamond2likecarbon(DLC)filmsarepotentialmaterialstobeusedasinfraredanti2reflectionprotectivecoatingsiftheiropticalabsorptioncanbereducedtogetrelativelythickfilmsneeded.Inthisstudy,h
4、ydrogen2freeDLCfilmsweredepositedinanunbalancedmagnetronsputtering(UBMS)sys——————————————————————————————————————------------------------------------------------------------------------------------------------tem.Theresultsoffilmthicknessuniformityshowedthatthissystemisc
5、apableofdepositinguniformfilmslargerthan150mmindiameter.TheinfraredtransmissionspectraofDLCfilmsindicatingthattransparentfilmswereobtainedintheinfraredregionforthesinglesideDLCcoatedonthesiliconandgermaniumsubstrates,andabout68.83%and63.05%transmittancewereachievedrespec
6、tivelyatthewavenumberof2983Pcm,closetotheoreticalvaluefornon2absorptioncarbonmaterial.Noobviousabsorptionpeakswerefoundbetween5000and800Pcm.Theseexcellentcharacteristicsshowthatthehydrogen2freeDLCfilmspreparedintheUBMSsystemweresuitableforinfraredtransmissionenhancementa
7、pplications.=Keywords>diamond2likecarbonfilms(DLC);unbalancedmagnetronsputtering(UBMS);thicknessuniformity;physicalvapordeposition(PVD)CLCnumber:O484.4DocumentCode:A非平衡磁控溅射技术制备用于红外减反射的无氢碳膜徐均琪,樊慧庆,刘卫国,杭凌侠1,2122(1.西北工业大学材料学院,凝固技术国家重点实验室,陕西西安710072;2.西安工业大学光电工程学院,陕西西安710
8、032)=摘要>红外减反射保护膜具有特定的厚度要求,如能进一步减小无氢类金刚石膜(DLC)的光学吸收,就能使其在较大厚度时不过分损失光通量而得以广泛应用。从这点来讲,无氢类金刚石膜是一种极具开发潜力的
