翻译(非平衡磁控溅射阴极的优化研究)

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1、翻译(非平衡磁控溅射阴极的优化研究)StudiesontheoptimisationofunbalancedmagnetronsputteringcathodesAbstractTheoptimisationisreportedonthedesignofunbalancedmagnetron(UBM)sputteringcathodes.Forthestudy,aplanarcircularcathodebackedbyadouble-coilelectromagnet(compatiblefora100mmdiametertarget

2、)wasdeveloped.Thevariationofthestructureandstrengthofthemagneticfieldinfrontofthetargetwasinvestigatedfordifferentcurrentcombinationsintheelectromagneticcoils,anditseffectonthesputteringprocesswasanalysed.Theobservationsonthemagneticfieldgeometryrevealedsomeinterestingfe

3、atures,suchasthebalancingpointofthefieldsalongtheaxis(null-point),andthezeroaxialregionoverthetargetsurface(Bz=0ring).Thepositionsofbothcouldbecontrolledbyadjustingtheratiooftheelectriccurrentinthecoils.Themagneticfieldnull-pointcouldbeusedasareferencefortheregionofhomog

4、eneousfilmgrowth.TheBz=0ringwasthelocationwheretheglowdischargeconcentrated(orwherethemaximumtargeterosionoccurred).Thediameteroftheringdeterminedtheareacoveredbythedischargeandthusthesputteringe

5、ciency.TheoptimumsubstratepositioncanbeTxedaccordingtothepositionofthenull-

6、pointandoptimisationofsputteringcanbeachievedbyadjustingthediameteroftheBz=0ring.TheresultsofthisstudyshouldbehelpfulinthedesigningofanidealUBMusingpermanentmagnetsaswellaselectromagnets.1.IntroductionTheunbalancedmagnetron(UBM)hasbeenthefocusofinterestforthePVDcommunity

7、foroveradecade[1].Whiletheconventionalmagnetronsputteringhasalreadymadeitsimpactonthethin-filmcoatingindustry,the”unbalanced”versionprovesmoreadvantageousbecauseitcombineshighdepositionratesandlow-energyionbombardmentatthesubstrate.Theionbombardmentisachievedbymodifyingt

8、heconventionalmagnetron(CM)withanadditionalmagneticfield,whichdeviatesthetrajectoriesofsecondaryelectronsfromtheglowdischargeregionconcentratednearthetarget,towardsthesubstrate.Thiswouldcreateanionisedregionnearthesubstrateandhencecausesionbombardmentonthegrowingfilm,the

9、rebymodifyingthepropertiesofthecoating[1D4].ThefirsteverdetailedstudyoftheUBM,isduetoWindowandSavvides[