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页数:18页
时间:2020-03-05
《洁净室测试方案.doc》由会员上传分享,免费在线阅读,更多相关内容在工程资料-天天文库。
1、CleanmomPernrrnsnceandCerl^catiimIVOAllCLEANROOMPACKAGECLEANROOMPERFORMANCETESTSCONTENT1.CLEANROOMLAYOUTANDREQUIREMENT2.CLEANROOMPERFORMANCETESTITEM3・CERTIFICATIONOFCLEANROOMPERFORMANCEA・AIRFLOWVELOCITY&VOLUMETESTB・FILTERLEAKAGETESTC・AIRBORNEPARTICLECOUNTTESTD・ILLUMINATIONTESTE・NOISELEVELTESTF・
2、ROOMPRESSURIZATIONTESTG.TEMPERATUREANDHUMIDITYTEST4.REFERENCE2.CertificationofCleanroomPerformanceTestItemNo.TestItemISO1.5Class10at0.1UmISO5Class100at0.5UmISO6ClassIKat0.5um123123123AAirFlowVelocityTestOXXOXXOXXBFilterLeakageTestOXXOXXOXXCAirBorneParticleCountTestoXXoXXoXXDIlluminationTestoXXo
3、XXoXXENoiseLevelTestoXXoXXoXXFRoomPressurizationTestoXXoXXoXXGTemperatureAndHumidityTestoXXoXXoXXREMARKS:1.1.AsBuilt;2:At-Rest;3:Operating2.O:L&KGuarantee.A:ForReferenceOnly.X-NoInclude.2.CERTIFICATIONOFCLEANROOMPERFORMANCE(A).AIRFLOWVELOCITYTESTA.测试仪器:1•测量风速及压力组MAKER:SHORTRIDGEINSTRUMENTINC.MO
4、DEL:ADM-870CACCURACY:±3%2.测量风量组MAKER:SHORTRIDGEINSTRUMENTINC.MODEL:FLOWHOODB.测试步骤:(1)每块Filter测试9点风速。(2)测试点置于Filter下方不约6吋(15cm)处量测。(3)计算每片Filter量测值之平均风速。C.测试点:每一Filter之出风表而均需测试。D.记录:记录于表格。E.验收标准:每一FILTER之风速需符合下列条件:每只Filter平均风速:0・35m/s±20%(0.28・0.42m/s)90%单点量测值:0・35m/s±20%(0.28-0.42m/s)1.1200mmx1
5、200mm风量为0.432CMM。2J200mmx900mm风量为0.324CMM。3.1200mmx600mm风量为0.216CMM。(A).FILTERLEAKAGETESTA.测试仪器:1.PARTICLECOUNTERMAKER:PMSMODELNO:LASAIR-110SPECIFICATION:SAMPLINGFLOWRATE:1CFMPARTICLESIZE:0.1,0.15,0.2,0.25,0.3,0.5,0.7,1.0um2.PARTICLECOUNTERMAKER:PMSMODELNO:LASAIRII-310ASPECIFICATION:SAMPLINGFLO
6、WRATE:1CFMPARTICLESIZE:0.3,0.5,1.0,5.0,10,25um3.AEROSOLGENERATORMAKER:PALASMODELNO:AGF2.0IP4.AEROSOLDILUTERMAKER:PALASMODELNO:VKL-100SB・测试步骤:(1)启动被测漏之FFU,利用ParticleCounter之采样器置于Filter下约2.5-3.0公分左右,以不超过10FPM(0.05M/S)之速率沿着ULPA之表面做有规律扫描。(2)采样器扫描进彳亍屮,需同时观察ParticleCounter之仪表显示值,当侦测到瞬间有4个以上之Particle吋
7、,则改以1FPM之速率重新探测,以确定是否有泄漏及泄漏之止确位置。(3)ULPA是否有泄漏是以ParticleCount所侦测到之数据,经三次重新扫描均超过规范吋为研判之依据,停在一定点测时不可有连续泄漏之发生。⑷如Filter上方之环境条件低丁•耍求浓度时,则以AerosolGenerator增加其浓度,DEHS与纯IPA以1:9混合产生之Particle使用于FilteroC.测试点:每一Filter之出风表而均需测试。1.尺寸为1200mmx1200
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