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1、TheoreticalAnalysisofSAWPropagationCharacteristicsin(100)OrientedAlN/DiamondStructureChia-ChiSung,Yuan-FengChiangRuyenRo,seniormember,IEEE,SeanWu,member,IEEEDepartmentofEngineeringScienceRuyueLeeDepartmentofElectronicsEngineeringandOceanEngineeringDepartmentofElectricalEngi
2、neeringandComputerScienceNationalTaiwanUniversityI-ShouUniversityTung-FangInstituteofTechnologyTaipei,Taiwan,R.O.C.Kaohsiung,Taiwan,R.O.C.Kaohsiung,Taiwan,R.O.C.d93525005@ntu.edu.twryro@isu.edu.twwusean.tw@gmail.comAbstract—Thesurfaceacousticwaves(SAWs)propagatinginattainah
3、igherphasevelocityandalargercouplingcoefficientinterdigitaltransducer(IDT)/(100)aluminumnitridethanthatin(002)AlN/(111)diamondstructure[5].(AlN)/diamondpossessthegreaterphasevelocityandcoupling2coefficientthanthoseinIDT/(002)AlN/diamond.Inthisstudy,Inadditiontoahighphasevel
4、ocityandlargeK,designingthefiniteelementmethod(FEM)isemployedtocalculateSAWlow-lossandminiatureSAWdevicessuchassinglephasecharacteristicsinthesetwolayeredstructureswithdifferentunidirectionaltransducers(SPUDTs),RFfiltersandduplexerselectricinterfaces;i.e.,IDT/AlN/diamond,Al
5、N/IDT/diamond,requiresalargereflectivityintheinterdigitaltransducersIDT/AlN/thinmetalfilm/diamond,andthinmetalfilm(IDTs)[8–15].Forexample,Kadotaetal.suggesteda/AlN/IDT/diamond.TheeffectsofCuandAlelectrodesonSAWreflectioncoefficientof0.15fordesigningwidebandcodecharacteristi
6、csareillustrated.Simulationresultsshowthatthedivisionmultipleaccess(WCDMA)duplexers[11].Generally,CuIDT/(100)AlN/diamondstructurecansupportaSAWwithareflectivitydependsuponthegeometryandmaterialconstantscouplingcoefficientof1.71%,aphasevelocityof9705m/s,andaoftheelectrode,e.
7、g.itsthickness,width,Young’smodulus,reflectivityof0.15,whichisapplicablefortheminiaturizedPoisson’sratio,andmassdensity.Tonoticeablyreducethewidebandandsuperhighbandapplications.devicesizewiththedesignedgratings,researcheshavestudiedtheusageofhighdensitymetalelectrodesuchas
8、W,Pt,Ta,Keywords-surfaceacousticwave;AlN;diamond;finiteelementAu,Ta,andCuinlayered
