lcd及其各制程介绍

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1、LCD培訓教材(一)圖案制作LCD基本構造(其斷面如下圖)塗佈光阻劑PhotoresistCoating顯影Developing蝕刻Etching剝膜Stripe配向膜塗佈PolyimideCoating灌液LCInjection定向Rubbing印框ScreenPrinting印點Cross-overPrinting預烤Pre-Curing塗佈SpacerSpray組合GlassAssembly曝光Exposure清洗Clean清洗Clean貼片PolarizerAssemblyLCD製程流程圖塗佈光阻劑PhotoresistCoat

2、ing顯影Developing蝕刻Etching剝膜Stripe配向膜塗佈PolyimideCoating灌液LCInjection定向Rubbing印框ScreenPrinting印點Cross-overPrinting預烤Pre-Curing撒佈SpacerSpray組合GlassAssembly曝光Exposure清洗Clean貼片PolarizerAssembly清洗Clean顯影Developing蝕刻Etching剝膜Stripe配向膜塗佈PolyimideCoating灌液LCInjection定向Rubbing印框Scre

3、enPrinting印點Cross-overPrinting預烤Pre-Curing撒佈SpacerSpray組合GlassAssembly曝光Exposure塗佈光阻劑PhotoresistCoating塗佈光阻劑PhotoresistCoating貼片PolarizerAssembly清洗Clean塗佈光阻劑PhotoresistCoating顯影Developing蝕刻Etching剝膜Stripe配向膜塗佈PolyimideCoating灌液LCInjection定向Rubbing印框ScreenPrinting印點Cross-o

4、verPrinting預烤Pre-Curing撒佈SpacerSpray組合GlassAssembly曝光Exposure曝光Exposure清洗Clean塗佈光阻劑PhotoresistCoating蝕刻Etching剝膜Stripe配向膜塗佈PolyimideCoating灌液LCInjection定向Rubbing印框ScreenPrinting印點Cross-overPrinting預烤Pre-Curing撒佈SpacerSpray組合GlassAssembly曝光Exposure顯影Developing顯影Developing貼

5、片PolarizerAssembly清洗Clean塗佈光阻劑PhotoresistCoating顯影Developing剝膜Stripe配向膜塗佈PolyimideCoating灌液LCInjection定向Rubbing印框ScreenPrinting印點Cross-overPrinting預烤Pre-Curing撒佈SpacerSpray組合GlassAssembly曝光Exposure蝕刻Etching蝕刻Etching貼片PolarizerAssembly清洗Clean塗佈光阻劑PhotoresistCoating顯影Develo

6、ping蝕刻Etching配向膜塗佈PolyimideCoating灌液LCInjection定向Rubbing印框ScreenPrinting印點Cross-overPrinting預烤Pre-Curing撒佈SpacerSpray組合GlassAssembly曝光Exposure剝膜Stripe剝膜Stripe貼片PolarizerAssembly導電玻璃材料就是在普通玻璃(不導電)的一個膠面層鍍上透明導電膜的玻璃.目前常用的導電玻璃是氧化銦,氧化錫玻璃,通常簡稱ITO玻璃,在生產過程中,每片玻璃都必經過万用電表檢測,導電面為ITO正

7、面,不導電面無ITO面為背面.一、ITO玻璃的結构,如圖1°SIO玻璃ITO圖1二、LCD制造用的ITO導電玻璃規格玻璃厚度:0.5mm0.7mm1.1mm玻璃面積:14"*16"(或355.6mm*406.4mm)300*350SiO2阻擋層:200~500A°(1A°=10–10米)ITO層厚:250~2000A°SiO2絕緣層厚:500~1000A°ITO導電玻璃的主要技術透光率8%方塊電阻RR10Ω、15Ω、30Ω、80Ω相對R越小越好若R10Ω/膜厚1000~2000A°R100---300Ω/膜厚200---300AITO玻

8、璃的技術要求平整度好,一般要求平整度<0.5um/20mm机械強度与化學抗蝕性能,ITO層對玻璃(SiO2)表面的粘附力要強,不易脫落,抗划傷強.ITO膜能抗強鹼,但易被酸腐蝕.光刻膠性能的主