GOI Characterization for Deep Submicron technology

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1、GATEOXIDEINTEGRITY(GOI)CHARACTERIZATIONFORDEEPSUBMICRONCMOSDEVICENORAINMOHDSAADSCHOOLOFMICROELECTRONICENGINEERINGUNIVERSITIMALAYSIAPERLIS2007ACKNOWLEDGEMENTSFirstandforemostIwouldliketodeeplythanktoAllahS.W.TforHisblessingandHishelpIamabletofinishmyfinalyearpro

2、jectandmyhighappreciationforthevariouspeoplewho,duringtheseveralmonthsinwhichthisendeavorlasted,providedmewithusefulandhelpfulassistance.Withouttheircareandconsideration,thisreportwouldlikelynothavematured.IwouldliketothankUniMAP'sRectorLt.Kol.ProfessorDato’Dr.

3、KamaruddinHussinforbeingagoodrectorandbringsoutallbestthingsinUniMAP,UniMAP'sSchoolofMicroelectronicEngineeringforprovidingmeanopportunitytodonemyfinalyearprojectinaconduciveway,mysupervisorMr.Ramzanb.MatAyubforhisguidancethroughmyprojectwhocontributedwithabund

4、antofknowledgeinMicroelectronicfieldthatreflecthisexpertise.Besides,Iwouldliketothankandcommendtheinterest,encouragement,andgreatjobdoneUniMAP’sstaffthroughouttheoverallprocessofmyfinalyearprojectrepresentedbyalltheteachingengineersandthetechnicianfromSchoolofM

5、icroelectronicEngineering.ThankYou.APPROVALANDDECLARATIONSHEETThisprojectreporttitledGateOxideIntegrity(GOI)CharacterizationforDeepSubmicronCMOSDevicewaspreparedandsubmittedbyNorainBt.Mohd.Saad(MatrixNumber:031010364)andhasbeenfoundsatisfactoryintermsofscope,qu

6、alityandpresentationaspartialfulfillmentoftherequirementfortheBachelorofEngineering(MicroelectronicEngineering)inUniversitiMalaysiaPerlis(UniMAP).CheckedandApprovedby_______________________(RAMZANBINMATAYUB)ProjectSupervisorSchoolofMicroelectronicEngineeringKol

7、ejUniversitiKejuruteraanUtaraMalaysiaMarch2007PENCIRIANINTEGRITIGETOKSIDA(GOI)UNTUKPERANTICMOSBERSKALAMIKRONABSTRAKSejakera(IntegrasiBerskalaBesar)VLSIpenskalaanketebalangetoksidamerupakanassetdalampengawalanimpaksaluranpendekperantisepertimanadimensigetMOSyang

8、telahmengalamipenskalaankecilsehingga0.1umpanjangsaluran.Projekinibertujuanuntukmengkajihubunganantarafenomenakerosakkangetoksidadanimpakataukesanyangberkaitandengansaluranp