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1、SensorsandActuators,A21-A23(1990)43l-434431LiquidTransportinMicronandSubmicronChannelsJPFAHLER,JHARLEYandHBAUDepartmentofMechantcalEngmeermgandApphedMechamcs,UtuvewtyofPemuyhwma,Phrladelphra,PA19104-6315(vSA)JZEMELDepartmentofElectnealEngmeermgandCenterforSensorTechnologtes,UnwersnyofPennsylva
2、nm,Phdade.@hm,PA191~6315(USA)Abstractbreakdown,(11)whethertheNavler-Stokes(N-S)equationsadequatelymodelthefhudflowAnexpenmentalmvestigatlonofflmdflowmmtheseverysmallscalesorshouldbemodifiedandextremelysmallchannels1spresentedPotentialifso,how,(m)dophenomenathataretypicallyapphcatlonsforsuchcha
3、nnelsincludecoolingofignoredmlarge-scalechannelsbecomennportantelectronicarcmts,andreactorsformod&&ionmsmall-scalechannels,and(iv)1sonsetofmstabrl-andseparationofblolo@calcellsTheimmediateItyaffectedbythesmallsizeofthechannels?goalIStodetermineatwhatlengthscalestheInordertoaddressthesequestlon
4、s,asequencecontmuumassumptionsbreakdownandiftheofsystematicexpenmentsisbemgconductedmNavler-StokesequationsadequatelypredictfledmcreasmglythinnerflowchannelsThelmtlalbehaviorInordertoaccomplishthis,expenmentsphaseofourworkconsistsofmeasurmgthepres-arebeingconductedmprogressivelythinnerflowsure
5、dropasafimtionoftheflowrateThechannelsWehaveconstructedthreechannelsofexpenmentalresultsarecompared~rlththeoreticalrectangularcross-sectionranginginareafrompredlctlonsbasedontheN-Sequationsandwith7200to80squarenucrons,utihzmgtherecentmformatlonavulablemtheliteratureforflowmadvancesmnucrofabnca
6、tlonInthispaper,pre-largechannelsInthispaper,someprehmmaryhmmaryresultsarereportedpertammgtofnctlonresultsaredescribedonthreeqmtedifferentchan-measurementsIt1sfoundthatmtherelativelynelsuesTheseresultsshouldbeconsideredlargeflowchannelstheexpenmentalobservationstentativearemroughagreementwitht
7、hepredictionsfromSincetheablhtytomanufacturesuchsmalltheNavler-StokesequationsHowever,mthestructures1srelativelynew,itISnotsupnsmgthatsmallestofthechannels,there1sasignificantverylittlehasbeenreportedontheSubJectinthedeviationfromtheNam
