Introduction to Nanotechnology

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1、IntroductiontonanotechnologyHenrikBruusMIC–DepartmentofMicroandNanotechnologyTechnicalUniversityofDenmarkLyngby,spring2004iiPrefaceInthespring2002MIClaunchedanewfourthsemestercourseattheTechnicalUniversityofDenmark(courseno.33320,10ECTS)toprovideageneralandbroadintroductiontothemulti-disci

2、plinaryfieldofnanotechnology.Thenumberofstudentsattendingthecoursehasgrownsteadilyfrom24in2002,to35thefollowingyearandnowmorethan50in2004.Basedonthefeed-backfromthestudentsIhavechangedpartofthecourseandexpandedthelecturenotes.Theaimofthecourseremainsthesame.Itisintendedforstudentswhohavecom

3、pletedthreesemestersinanyengineeringorsciencestudyprogrammeatcollegelevel.Duringthecoursethestudentswillbeintroducedtomanyfascinatingphenomenaonthenanometerscale,andtheywillhopefullyacquirebasicknowledgeofthetheoreticalconceptsandexperimentaltechniquesbehindtherecentvastlyimprovedabilityto

4、observe,fabricateandmanipulateindividualstructuresonthenanometerscale.Thefirstpartofthecourse,whichiscoveredbytheselecturenotes,isanintroductiontothetop-downapproachofmicroelectronicsandmicromechanics.HereselectredtopicsliketheAFMandquantumtransportarestudiedinsomedetail.Thesecondparthasamu

5、chbroaderfocus.Heretheaimistogivethestudentsanoverviewoftheon-goingmergeofthetop-downapproachwiththebottom-upapproachofchemistry/biochemistry;adevelopmentthatiscreatingnewandexcitingcross-disciplinaryresearchfieldsandtech-nologies.Muchofthematerialusedinthispartofthecourseisprovidedbyguestl

6、ecturersHenrikBruusMIC–DepartmentofMicroandNanotechnologyTechnicalUniversityofDenmark26January2004iiiivPREFACEContents1Top-downmicroandnanotechnology11.1MicrofabricationandMoore’slaw........................31.2Cleanroomfacilities...............................41.3Photolithography..........

7、.......................51.4Electronbeamlithography............................61.5Nanoimprintlithography.............................82Abriefintrotoquantumphysics112.1Theparticle-waveduality............................112.2deBrogliewaves.......................